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NTIS 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0147205 (1980-05-06) |
발명자 / 주소 |
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출원인 / 주소 |
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인용정보 | 피인용 횟수 : 84 인용 특허 : 1 |
Water contamination of the oil in vacuum pumps of high vacuum systems is a major problem in maintaining efficient operation of those pumps. The problem is especially acute where a system includes an evacuated work chamber that must be repeatedly opened for loading products into and unloading them fr
In processing work products in a high vacuum work chamber which is repeatedly opened and closed to atmosphere in loading said products into and unloading them from said chamber, wherein there are employed in conjunction with said chamber first stage and final stage vacuum pump means, a roughing vacu
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