초록 ▼

A purging apparatus having a process gas connector wherein a purging gas is injected into the connector so that trapped process gas is thoroughly purged from the connector. Tubing in the shape of a double helix is connected to the process gas connector. One tube of the double helix is connected to a

A purging apparatus having a process gas connector wherein a purging gas is injected into the connector so that trapped process gas is thoroughly purged from the connector. Tubing in the shape of a double helix is connected to the process gas connector. One tube of the double helix is connected to a purge valve for providing purging gas to an injection port of the process gas connector. The other tube of the double helix provides a flow path for the process gas which then flows through a filter, a vacuum pump valve, a high pressure process valve, a regulator, a low pressure process valve, and then out to the process equipment. In order to purge the process gas from the purging apparatus, the high pressure process valve is set to direct a gas flow to a vent valve which is connected to a scrubber. The low pressure process valve may also be set to direct gas flow to a low pressure vent valve which is also connected to a scrubber. Finally, the purging apparatus may be evacuated by setting the vacuum pump valve to permit gas to be evacuated from the purging apparatus.

대표청구항 ▼

1. A purging apparatus comprising: first source means for receiving a purging gas source; first valve source means connected to the first means for receiving said purging gas source for controlling the flow of said purging gas; a first flexible tube connected to the first valve means; a proces

1. A purging apparatus comprising: first source means for receiving a purging gas source; first valve source means connected to the first means for receiving said purging gas source for controlling the flow of said purging gas; a first flexible tube connected to the first valve means; a process gas connector including connecting means for connecting to a process gas supply, a process gas port, a process gas channel between said process gas port and said connecting means for connecting to said process gas supply, an injection port, and an injection channel between said injection port and said process gas channel, said injection port being connected to the first flexible tube and intersecting said process gas channel at an acute angle and in close proximity to the process gas source; a second flexible tube connected about one end to said process gas port of the process gas connector; second valve means being connected to the second flexible tube and conduit means for receiving the process gas flow, the second valve means having a vent port and a process port for directing gas flow from the second flexible tube to said vent port or to said process port; third valve means connected to said vent port of the second valve means for controlling the release of gas from the purging apparatus; a regulator having a high pressure port and a low pressure port, said high pressure port of the regulator connected to said process port of the second valve means; means for connecting process equipment to said low pressure port of the regulator and said purging gas purges the first and second flexible tubes, the process gas connector, the first, second, and third valve means, the conduit means and exits the vent ports of the second and third valve means. 2. A purging apparatus comprising: first source means for receiving a purging gas source; first valve means connected to the first source means for receiving said purging gas source for controlling the flow of said purging gas; a first flexible tube connected to the first valve means; a process gas connector including connecting means for connecting to a process gas supply, a process gas port, a process gas channel between said process gas port and said connecting means for connecting to said process gas supply, an injection port, and an injection channel between said injection port and said process gas channel, said injection port being connected to the first flexible tube and intersecting said process gas channel at an acute angle and in close proximity to the process gas source; a second flexible tube connected about one end to said process gas port of the process gas connector; second valve means being connected to the second flexible tube, the second valve means having a vent port and a process port for directing gas flow from the second flexible tube to said vent port or to said process port; third valve means connected to said vent port of the second valve means for controlling the release of gas from the purging apparatus; a regulator having a high pressure port and a low pressure port, said high pressure port of the regulator connected to said process port of the second valve means; means for connecting process equipment to said low pressure port of the regulator; fourth valve means connected to the low pressure port of the regulator and having the means for connecting to process equipment connected to a process port of the fourth valve means and also including a vent port for directing gas flow from said low pressure port of the regulator to said process port of the fourth valve means or to said vent port of the fourth valve means; and fifth valve means connected to the vent port of the fourth valve means and including a vent port for controlling release of gas from the purging apparatus through said vent port of the fifth valve means. 3. The purging apparatus of claim 2, further comprising sixth valve means connected between the second flexible tube and the second valve means and including a vacuum pump port for permitting gas flow from the second flexible tube to the second valve means or for permitting gas flow from the second flexible tube and second valve means to said vacuum pump port. 4. The purging apparatus of claim 1 or 2 further comprising a filter connected between the second flexible tube and the second valve means. 5. The purging apparatus of claim 3, further comprising a filter connected between the second flexible tube and the sixth valve means. 6. The purging apparatus of claim 1 or 2, wherein the first flexible tube and second flexible tube form a double helix of tubing. 7. The purging apparatus of claim 1 or 2, wherein said acute angle is between 15° and 45°. 8. The purging apparatus of claim 6 wherein the double helix of tubing comprises a multiplicity of loops of each the first and the second tube; and including rigid support means intermediate the filter and the first valve means. 9. The purging apparatus of claim 1 or 2 further comprising a check valve connected between the purging gas source and the first valve means, said check valve permitting flow of gas away from, but not toward, the purging gas source.