IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
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출원번호 |
US-0190454
(1980-09-24)
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우선권정보 |
JP-0124537 (1979-09-27); JP-0028735 (1980-03-07); JP-0031235 (1980-03-12); JP-0083586 (1980-06-20) |
발명자
/ 주소 |
- Ogino, Yasuo
- Niwa, Yukichi
- Ohwada, Mitsutoshi
- Tanaka, Kazuo
- Koumura, Noboru
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출원인 / 주소 |
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대리인 / 주소 |
Fitzpatrick, Cella, Harper & Sinto
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인용정보 |
피인용 횟수 :
9 인용 특허 :
3 |
초록
▼
Disclosed is a device for detecting an incident position of radiation beam, particularly, its center or center of gravity. The detecting device is provided with a scanning type radiation beam sensing device having a plurality of radiation sensing elements in a linear arrangement, and the sensing dev
Disclosed is a device for detecting an incident position of radiation beam, particularly, its center or center of gravity. The detecting device is provided with a scanning type radiation beam sensing device having a plurality of radiation sensing elements in a linear arrangement, and the sensing device is disposed in such a manner that its radiation receiving surface may be substantially coincided with an incident surface of the radiation beam to be detected. When reading an output from the sensing device, the time sequential output signals from the sensing device are split into predetermined sections, and the signal quantities among the sections are compared. In this way, the position of the center or the center of gravity of the radiation beam on the incident surface is detected with the position corresponding to a split point of the signals as the reference.
대표청구항
▼
1. A device for detecting a position of a substantial center of gravity of a distribution pattern of a radiation on a predetermined plane, comprising: (a) scanning means for scanning said distribution pattern of the radiation on said plane, said scanning means generating a time-sequential output
1. A device for detecting a position of a substantial center of gravity of a distribution pattern of a radiation on a predetermined plane, comprising: (a) scanning means for scanning said distribution pattern of the radiation on said plane, said scanning means generating a time-sequential output signal representing the radiation distribution pattern on said plane; and (b) circuit means for detecting the position of the substantial center of gravity of said radiation distribution pattern on said plane on the basis of the time-sequential output signal from said scanning means, said circuit means dividing the time-sequential output signal into predetermined signal sections and generating an output which varies with the change in the position of the substantial center of gravity of said radiation distribution pattern on said plane. 2. The device as set forth in claim 1, wherein said circuit means divides the time-sequential output signal from said scanning means into two signal sections of mutually the same size, and substantially compares the signal quantities in said two signal sections, thereby generating the output representing the position of the substantial center of gravity of said radiation distribution pattern on said plane with a position on said plane corresponding to a dividing point of the signal as a reference. 3. The device as set forth in claim 2, wherein said circuit means performs an operation to be expressed by the following equation: ##EQU## where: V(t) denotes the time-sequential output signal of said scanning means; and ti-tj and tj-tk represent time ranges corresponding to said two signal, respectively, provided ti-tj=tj-tk. 4. The device as set forth in claim 3, wherein said circuit means includes: polarity reversing means for reversing the polarity of the signal corresponding to one of said signal sections so that the polarities of the signals corresponding to said two signal sections are in a mutually opposite relationship; and integration means for sequentially integrating the signal corresponding to the one of said signal sections, the polarity of which has been reversed by said polarity reversing means, and the signal corresponding to the other signal section, the polarity of which has not been reversed, an output from said integration means representing the position of the substantial center of gravity of said radiation distribution pattern on said plane. 5. The device as set forth in any one of claims 1 to 4, further including: control means for repeatedly performing the scanning operation of said scanning means and the detecting operation of said circuit means accompanying said scanning operation, said circuit means adding newly obtained data to those already obtained data at every time it repeats the detecting operation, and holding the same; counting means for counting the number of times of the detecting operation by said circuit means, said counting means generating a characteristic output when the number of times of the detecting operation by said circuit means reaches predetermined number of times; and sampling means for sampling an output from said circuit means based on the characteristic output from said counting means, an output from said sample means representing the position of the substantial center of gravity of said radiation distribution pattern on said plane. 6. The device as set forth in claim 5, further including: clearing means for clearing the data as held by said circuit means after termination of the data sampling by said sampling means. 7. The device as set forth in claim 5, further including: total sum integrated value detecting means for finding out an integrated value of the total sum of the signal quantities in said signal sections at the time of repetition of the detecting operation by said circuit means; and comparison means for detecting whether the output level of said total sum integrated value detecting means has reached a predetermined level or not, said comparison means generating a characteristics output when the output level of said total sum integrated value detecting means reaches the predetermined level, said sampling means being capable of responding to both outputs from said counting means and said comparison means, and sampling the output from said circuit means based on a horologically preferential output. 8. The device as set forth in claim 7, further including: clearing means to clear the data held by said circuit means and said total sum integrated value detecting means, after termination of the data sampling by said sampling means. 9. The device as set forth in any one of claims 1 to 4, further including: control means for repeatedly performing the scanning operation of said scanning means and the detecting operation of said circuit means accompanying said scanning operation, said circuit means adding newly obtained data to those already obtained data at every time it repeats the detecting operation, and holding the same; total sum integrated value detecting means for finding out an integrated value of the total sum of the signal quantities in said signal sections at the time of repeated detecting operation by said circuit means; comparison means for detecting whether the output level of said total sum integrated value detecting means has reached a predetermined level or not, said comparison means generating a characteristics output when the output level of said total sum integrated value detecting means reaches the predetermined level; and sampling means for sampling the output from said circuit means based on the characteristic output from said comparison circuit, an output from said sampling means representing the position of the substantial center of gravity of said radiation distribution pattern on said plane. 10. The device as set forth in claim 9, further including: clearing means to clear the data held by said circuit means and said total sum integrated value detecting means, after termination of the data sampling by said sampling means. 11. The device as set forth in claim 9, further including: unit total sum integrating means for finding out the total sum of the signal quantities in said signal sections at every one detecting operation, when said circuit means repeats its detecting operation; and signal level control means to control a level of an output signal from said scanning means based on the output from said unit total sum integrating means. 12. The device as set forth in claim 11, wherein said scanning means is a signal integrating and accumulating type scanning means having the functions of generating an electrical signal in accordance with energy intensity of said radiation pattern at every fine portion thereof and of accumulating the electrical signal therein, and said signal level control means is signal integration time control means which controls a level of the output signal therefrom by controlling the signal integration time of said scanning means based on the output from said unit total sum detecting means. 13. The device as set forth in claim 5, further including: unit total sum integrating means for finding out the total sum of the signal quantities in said signal sections at every one detecting operation when said circuit means repeats its detecting operation; and signal level control means to control a level of an output signal from said scanning means based on the output from said unit total sum integrating means. 14. The device as set forth in claim 13, wherein said scanning means is a signal integrating and accumulating type scanning means having the functions of generating an electrical signal in accordance with energy intensity of said radiation pattern at every fine portion thereof and of accumulating the electrical signal therein, and said signal level control means is signal integration time control means which controls a level of the output signal therefrom by controlling the signal integration time of said scanning means based on the output from said unit total sum detecting means. 15. The device as set forth in any one of claims 1 to 4, further including: unit total sum integrating means for finding out the total sum of the signal quantities in said signal sections at every one detecting operation when said circuit means repeats its detecting operation; and signal level control means to control a level of an output signal from said scanning means based on the output from said unit total sum integrating means. 16. The device as set forth in claim 15, wherein said scanning means is a signal integrating and accumulating type scanning means having the functions of generating an electrical signal in accordance with energy intensity of said radiation pattern at every fine portion thereof and of accumulating the electrical signal therein, and said signal level control means is signal integration time control means which controls a level of the output signal therefrom by controlling the signal integration time of said scanning means based on the output from said unit total sum detecting means. 17. The device as set forth in claim 2, wherein said radiation is an intermittent radiation which projects intermittently onto said predetermined plane, and said circuit means is so constructed that it may perform an operation to be expressed by the following equation, when a time-sequential signal of said scanning means corresponding to a state where said radiation is projecting onto said predetermined plane is denoted by V(t), an output signal of said scanning means corresponding to a state where said radiation is not projecting onto said plane is represented by V'(t), and time ranges corresponding to said two signal sections are denoted by ti-tj and tj-tk, respectively, projected ti-tj=tj-tk: ##EQU## 18. The device as set forth in claim 17, wherein said circuit means comprising: polarity reversing means for reversing the polarity of a signal corresponding to a predetermined signal section so that the polarities of the signals corresponding to said two signal sections are in a mutually opposite relationship and so that the polarity polarities of the signals for the relatively corresponding signal are in a mutually opposite relationship between the output signal from said scanning means corresponding to a state where said radiation is projecting onto said plane and the output signal from said scanning means corresponding to a state where said radiation is not projecting onto said plane; and integration means for sequentially integrating, during one detection cycle, the signal whose polarity has been reversed by said polarity reversing means and the signal whose polarity has not been reversed by said polarity reversing means, when one reading from said scanning means of the output signal corresponding to a state where said radiation is projecting onto said plane and one reading of the output signal corresponding to a state where said radiation is not projecting onto said plane are made to constitute one detection cycle, an output from said integration means representing the position of the substantial center of gravity of said radiation distribution pattern on said plane. 19. The device as set forth in claim 17 or 18, further comprising: control means for repeatedly performing the detecting operations of said circuit means which makes the one reading, out of said scanning means, of the output signal corresponding to a state where said radiation is projecting onto said plane and the one reading of the output signal corresponding to a state where said radiation is not projecting onto said plane to constitute the one detection cycle, said circuit means adding newly obtained data at every repetition of the detecting cycle to the already obtained data, and holding the same therein; counting means for counting number of times of said detecting cycle, said counting means generating a characteristic output when the number of times of said detecting cycle has reached predetermined number of times; and sampling means for sampling the output from said circuit means based on the characteristic output from said counting means, an output from said sampling means representing the position of the substantial center of gravity of said radiation distribution pattern on said plane. 20. The device as set forth in claim 19, further including: clearing means for clearing the data as held by said circuit means after termination of the data sampling by said sampling means. 21. The device as set forth in claim 19, further including: total sum difference integrated value detecting means to find out, at the time of repetition of said detecting cycle, an integrated value of a difference between the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is projecting onto said plane and the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is not projecting onto said plane; and comparison means to detect whether the output level of said total sum difference integrated value detecting means has reached a predetermined level or not, said comparison means generating a characteristic output when the output level of the total sum difference integrated value detecting means reaches the predetermined level, said sampling means being capable of responding to both outputs from said counting means and said comparison means, and sampling the output from said circuit means based on a horologically preferential output. 22. The device as set forth in claim 21, further including: clearing means to clear the data held by said circuit means and said total sum difference integrated value detecting means, after termination of the data sampling by said sampling means. 23. The device as set forth in claim 17 or 18, further including: control means for repeatedly performing the detecting operations of said circuit means which makes the one reading, out of said scanning means, of the output signal corresponding to a state where said radiation is projecting onto said plane and the one reading of the output signal corresponding to a state where said radiation is not projecting onto said plane to constitute the one detection cycle, said circuit means adding newly obtained data at every repetition of the detecting cycle to the already obtained data, and holding the same therein; total sum difference integrated value detecting means to find out, at the time of repetition of said detecting cycle, an integrated value of a difference between the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is projecting onto said plane and the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is not projecting on said plane; comparison means to detect whether the output level of said total sum difference integrated value detecting means has reached a predetermined level or not, said comparison means generating a characteristic output when the output level of the total sum difference integrated value detecting means reaches the predetermined level; and sampling means to sample an output from said circuit means based on the characteristic output from said comparison means, an output from said sampling means representing the position of the substantial center of gravity of said radiation distribution pattern on said plane. 24. The device as set forth in claim 23, further including: clearing means to clear the data held by said circuit means and said total sum difference integrated value detecting means, after termination of the data sampling by said sampling means. 25. The device as set forth in claim 23, further including: unit total sum difference detecting means to find out, at every one detecting cycle during repetition of said detecting cycles, a difference between the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is projecting onto said plane and the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is not projecting onto said plane; and signal level control means to control a level of an output signal from said scanning means based on the output from said unit total sum difference detecting means. 26. The device as set forth in claim 25, wherein said scanning means is a signal integrating and accumulating type scanning means having the functions of generating an electrical signal in accordance with energy intensity of said radiation pattern at every fine portion thereof and of accumulating the electrical signal therein, and said signal level control means is signal integration time control means which controls a level of the output signal therefrom by controlling the signal integration time of said scanning means based on the output from said unit total sum difference detecting means. 27. The device as set forth in claim 19, further including: unit total sum difference detecting means to find out, at every one detecting cycle during repetition of said detecting cycle, a difference between the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is projecting onto said plane and the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is not projecting onto said plane; and signal level control means to control a level of an output signal from said scanning means based on the output from said unit total sum difference detecting means. 28. The device as set forth in claim 27, wherein said scanning means is a signal integrating and accumulating type scanning means having the functions of generating an electrical signal in accordance with energy intensity of said radiation pattern at every fine portion of said radiation pattern, and of accumulating the electrical signal therein, and said signal level control means is signal integration time control means which controls a level of the output signal therefrom by controlling the signal integration time of said scanning means based on the output from said unit total sum difference detecting means. 29. The device as set forth in claim 17 or 18, further including: unit total sum difference detecting means to find out, at every detecting cycle during repetition of the detecting cycle which constitutes one detecting cycle with the one reading of the output signal from said scanning means corresponding to a state where said radiation is projecting onot said plane and the one reading of the output signal corresponding to a state where said radiation is not projecting onto said plane, a difference between the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is projecting onto said plane and the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is not projecting onto said plane; and Signal level control means to control a level of an output signal from said scanning means based on the output from said unit total sum difference detecting means. 30. The device as set forth in claim 29, wherein said scanning means is a signal integrating and accumulating type scanning means having the functions of generating an electrical signal in accordance with energy intensity of said radiation pattern at every fine portion of said radiation pattern, and of accumulating the electrical signal therein, and said signal level control means is signal integration time control means which controls a level of the output signal therefrom by controlling the signal integration time of said scanning means based on the output from said unit total sum difference detecting means. 31. In an optical instrument having an objective lens means which is movable along an optical axis so as to form an image of an object on a predetermined imaging plane, a system for detecting focusing condition of said objective lens means to said object, comprising: (a) radiation projecting means for projecting radiation toward said object through a part of said objective lens means, said radiation projecting means having a radiation generating source, and a substantial center of said radiation generating source being disposed in substantial coincidence with a predetermined position on a first plane conjugative with said predetermined imaging plane, and a position, on a second plane conjugative with said first plane, of a substantial center of gravity of a pattern of said radiation reflected by said object after being projected from said radiation projecting means through a part of said objective lens means and entering through the other part of said objective lens means varying in accordance with the focusing condition of the objective means lens means to said object; (b) scanning means for scanning said radiation pattern on said second plane, said scanning means having a radiation receiving plane substantially coincident with said second plane, a predetermined position on said radiation receiving plane being disposed in substantial coincidence with a position which is conjugative with said predetermined position on said first plane, and said scanning means generating a time-sequential output signal representing the radiation pattern on said radiation receiving plane; and (c) circuit means for detecting a position of a substantial center of gravity of the pattern of said reflected radiation on said second plane on the basis of the time-sequential output signal from said scanning means, said circuit means dividing said time-sequential output signal into two signal sections of substantially the same size on the march of a point corresponding to said predetermined position on said radiation receiving plane of said scanning means and generating an output representing the position of the substantial center of gravity of the pattern of said reflected radiation on said second plane, hence the focusing condition of said objective lens means with respect to said object. 32. The system as set forth in claim 31, wherein said circuit means is so constructed that it performs an operation to be expressed by the following equation ##EQU## where V(t) denotes the time-sequential output signal of said scanning means; and ti-tj and tj-tk represent time ranges corresponding to said two signal sections, respectively, provided ti-tj=tj-tk. 33. The system as set forth in claim 32, wherein said circuit means includes: polarity reversing means for reversing the polarity of the signal corresponding to one of said signal sections in such a manner that the polarity of the signals corresponding to said two signal sections may be in a mutually opposite relationship; and integration means for sequentially integrating the signal corresponding to one of said signal sections, the polarity of which has been reversed by said polarity reversing means, and the signal corresponding to the other signal sections, the polarity of which has not been reversed, an output from said integration means representing the position of the substantial center of gravity of the pattern of said reflected radiation on said second plane. 34. The system as set forth in claim 31, further including: control means for repeatedly performing the scanning operation of said scanning means and the detecting operation of said circuit means accompanied by said scanning operation, said circuit means adding newly obtained data to those already obtained data at every time it repeats the detecting operation, and holding the same; counting means for counting the number of times of the detecting operation by said circuit means, said counting means generating a characteristic output when the number of times of the detecting operation by said circuit means reaches predetermined number of times; and sampling means for sampling an output from said circuit means based on the characteristic output from said counting means, an output from said sampling means representing the position of the substantial center of gravity of the pattern of said reflected radiation on said second plane. 35. The system as set forth in claim 34, further including: clearing means for clearing the data as held by said circuit means after completion of the data sampling by said sampling means. 36. The system as set forth in claim 34, further including: total sum integrated value detecting means for finding out an integrated value of the total sum of the signal quantities in said signal sections at the time of repetition of the detecting operation by said circuit means; and comparison means for detecting whether the output level of said total sum integrated value detecting means has reached a predetermined level or not, said comparison means generating a characteristics output when the output level of said total sum integrated value detecting means reaches the predetermined level, said sampling means being capable of responding to both outputs from said counting means and said comparison means, and sampling the output from said circuit means based on a horologically preferential output. 37. The system as set forth in claim 36, further including: clearing means to clear the data held by said circuit means and said total sum integrated value detecting means, after termination of the data sampling by said sampling means. 38. The system as set forth in claim 31, further including: control means for repeatedly performing the scanning operation of said scanning means and the detecting operation of said circuit means accompanying said scanning operation, said circuit means adding newly obtained data to those already obtained data at every time it repeats the detecting operation, and holding the same; total sum integrated value detecting means for finding out an integrated value of the total sum of the signal quantities in said signal sections at the time of repeated detecting operation by said circuit means; comparison means for detecting whether the output level of said total sum integrated value detecting means has reached a predetermined level or not, said comparison means generating a characteristic output when the output level of said total sum integrated value detecting means reaches the predetermined level; and sampling means for sampling the output from said circuit means based on the characteristic output from said comparison circuit, an output from said sampling means representing the position of the substantial center of gravity of the pattern of said reflected radiation on said second plane. 39. The system as set forth in claim 38, further including: clearing means to clear the data held by said circuit means and said total sum integrated value detecting means, after termination of the data sampling by said sampling means. 40. The system as set forth in any one of claims 31 to 39, further including: unit total sum integrating means for finding out the total sum of the signal quantities in said signal sections at every one detecting operation when said circuit means repeats its detecting operation; and signal level control means to control a level of an output signal from said scanning means based on the output from said unit total sum integrating means. 41. The system as set forth in claim 40, wherein said scanning means is a signal integrating and accumulating type scanning means having the functions of generating an electrical signal in accordance with energy intensity of said radiation pattern at every fine portion thereof and a accumulating the electrical signal therein, and said signal level control means is signal integration time control means which controls a level of the output signal therefrom by controlling the signal integration time of said scanning means based on the output from said unit total sum detecting means. 42. The system as set forth in claim 31, further including: projection control means to cause said radiation projecting means to intermittently project said radiation, said circuit means being so constructed that, at the time of said intermittent projection of the radiation, it performs an operation to be expressed by the following equation, when a time-sequential signal of said scanning means corresponding to a state where said radiation is projecting onto said predetermined plane is denoted by V(t), an output signal of said scanning means corresponding to a state where said radiation is not projecting onto said plane is represented by V'(t), and time ranges corresponding to said two signal sections are denoted by ti-tj and tj-tk, respectively, provided ti-tj=tj-tk: ##EQU## 43. The system as set forth in claim 42, wherein said circuit means comprising: polarity reversing means for reversing the polarity of a signal corresponding to a predetermined signal section so that the polarities of the signals corresponding to said two signal sections are in a mutually opposite relationship and so that the polarities of the signals for the relatively corresponding signal sections are in a mutually opposite relationship between the output signal from said scanning means corresponding to a state where said radiation is projecting onto said second plane and the output signal from said scanning means corresponding to a state where said radiation is not projecting onto said second plane; and integration means for sequentially integrating, during one detection cycle, the signal whose polarity has been reversed by said polarity reversing means and the signal whose polarity has not been reversed by said polarity reversing means, when one reading from said scanning means of the output signal corresponding to a state where said radiation is projecting onto said second plane and one reading of the output signal corresponding to a state where said radiation is not projecting onto said second plane are made to constitute one detection cycle, an output from said integration means representing the position of the substantial center of gravity of the pattern of said reflected radiation on said second plane. 44. The system as set forth in claim 42, further comprising: control means for repeatedly performing the detecting operations of said circuit means which makes the one reading, out of said scanning means, of the output signal corresponding to a state where said radiation is projecting onto said second plane and the one reading of the output signal corresponding to a state where said radiation is not projecting onto said second plane to constitute the one detection cycle, said circuit means adding newly obtained data at every repetition of the detecting cycle to the already obtained data, and holding the same therein; counting means for counting number of times of said detecting cycle, said counting means generating a characteristic output when the number of times of said detecting cycle has reached predetermined numbers of times; and sampling means for sampling the output from said circuit means based on the characteristic output from said counting means, an output from said sampling means representing the position of the substantial center of gravity of the pattern of said reflected radiation on said second plane. 45. The system as set forth in claim 44, further including: clearing means for clearing the data as held by said circuit means after termination of the data sampling by said sampling means. 46. The system as set forth in claim 44, further including: total sum difference integrated value detecting means to find out, at the time of repetition of said detecting cycle, an integrated value of a difference between the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is projecting onto said second plane and the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is not projecting onto said second plane; and comparison means to detect whether the output level of said total sum difference integrated value detecting means has reached a predetermined level or not, said comparison means generating a characteristic output when the output level of the total sum difference integrated value detecting means reaches the predetermined level. said sampling means being capable of responding to both outputs from said counting means and said comparison means, and sampling the output from said circuit means based on a horologically preferential output. 47. The system as set forth in claim 46, further including: clearing means to clear the data held by said circuit means and said total sum difference integrated value detecting means, after termination of the data sampling by said sampling means. 48. The system as set forth in claim 42, further including: control means for repeatedly performing the detecting operations of said circuit means which makes the one reading, out of said scanning means, of the output signal corresponding to a state where said radiation is projecting onto said second plane and the one reading of the output signal corresponding to a state where said radiation is not projecting onto said second plane to constitute the one detection cycle, said circuit means adding newly obtained data at every repetition of the detecting cycle to the already obtained data, and holding the same therein; total sum difference integrated value detecting means to find out, at the time of repetition of said detecting cycle, an integrated value of a difference between the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is projecting onto said second plane and the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is not projecting on said second plane, comparison means to detect whether the output level of said total sum difference integrated value detecting means has reached a predetermined level or not, said comparison means generating a characteristic output when the output level of the total sum difference integrated value detecting means reaches the predetermined level, and sampling means to sample an output from said circuit means based on the characteristic output from said comparison means, an output from said sampling means representing the position of the substantial center of gravity of the pattern of said reflected radiation on said second plane. 49. The system as set forth in claim 48, further including: clearing means to clear the data held by said circuit means and said total sum difference integrated value detecting means, after termination of the data sampling by said sampling means. 50. The system as set forth in any one of claims 42 to 48, further including: unit total sum difference detecting means to find out, at every detecting cycle during repetition of the detecting cycle which constitutes one detecting cycle with the one reading of the output signal from said scanning means corresponding to a state where said radiation is projecting onto said second plane and the one reading of the output signal corresponding to a state where said radiation is not projecting onto said second plane, a difference between the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is projecting onto said second plane and the total sum of the signal quantities in said both signal sections with respect to the output signal from said scanning means corresponding to a state where said radiation is not projecting onto said second plane; and signal level control means to control a level of an output signal from said scanning means based on the output from said unit total sum difference detecting means. 51. The system as set forth in claim 50, wherein said scanning means is a signal integrating and accumulating type scanning means having the functions of generating an electrical signal in accordance with energy intensity of said radiation pattern at every fine portion thereof and of accumulating the electrical signal therein, and said signal level control means is signal integration time control means which controls a level of the output signal therefrom by controlling the signal integration time of said scanning means based on the output from said unit total sum difference detecting means.
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