초록

A system for precisely controlling the mass flow rate of vapor from a bubbler by a carrier gas stream.

대표청구항 ▼

A method for improving the accuracy in supplying a continuous uniform mass flow of vaporized material from a chemical vapor delivery system which includes a container partially filled with material to be vaporized and applied to a vapor using system, said container being at substantially atmospheric

A method for improving the accuracy in supplying a continuous uniform mass flow of vaporized material from a chemical vapor delivery system which includes a container partially filled with material to be vaporized and applied to a vapor using system, said container being at substantially atmospheric pressure, means for ducting a carrier gas through said material to transport said vaporized material, a valve for controlling the flow of said carrier gas to said container, and means for controlling the temperature of the material in said container, said method comprising: sensing the relatively small deviation from nominal atmospheric pressure of the total gaseous pressure in said container, which includes pressure variations therein caused by conditions downstream from the container; generating a signal utilizing said pressure deviation; transmitting said signal to said flow control valve, said signal adjusting said flow control valve to control the carrier gas flow to provide said continuous, uniform mass flow of said vaporized material with reduced error in said mass flow which would otherwise be caused by said pressure deviation. A chemical vapor delivery system comprising: a bubbler container for holding a quantity of high purity liquid to be vaporized and applied to a using system, said container being at substantially atmospheric pressure; means for transporting a carrier gas through said liquid to transport the vaporized material to the using system; means for sensing the carrier gas flow rate; valve means for controlling the flow of said carrier gas; means for sensing and controlling the temperature of said liquid; means for sensing the total gaseous pressure in said container which includes pressure variations therein caused by conditions downstream from the container; and controller means connected to receive the sensed carrier gas flow rate, the sensed temperature and the sensed pressure and to compare said sensed pressure with a reference pressure to provide a pressure differential indicative of a relatively small deviation from atmospheric pressure, said controller utilizing said pressure differential for reducing error in the mass flow rate of vapor which would otherwise be caused by said pressure deviation and producing a signal for controlling said carrier gas flow control valve means in a manner to produce a continuous, uniform mass flow of said vaporized liquid to said using system.