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Alignment method and apparatus for x-ray or optical lithography

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01B-009/02
  • G01B-011/00
출원번호 US-0265140 (1981-05-20)
발명자 / 주소
  • Grobman Warren D. (Yorktown Heights NY) Nelson
  • Jr. David A. (Carmel NY) Warlaumont John M. (Croton-on-Hudson NY)
출원인 / 주소
  • IBM Corporation (Armonk NY 02)
인용정보 피인용 횟수 : 25  인용 특허 : 2

초록

Fine alignment of mask and wafer, using Fresnel zone plates is achieved. Light is focused on the wafer by a zone plate in the mask. Light diffracted from a zone plate on the wafer is received by a sensor. The received light is coded (analog or digital) to indicate alignment. For analog coding the wa

대표청구항

An alignment system wherein a first element to be aligned carries a Fresnel lens for focusing incident light to line image on a grating mark carried by a second element to be aligned therewith, the grating mark diffracting line image light to a light sensor, said Fresnel lens comprising a plurality

이 특허에 인용된 특허 (2)

  1. Fay Bernard (Paris FRX) Trotel Jacques (Paris FRX) Frichet Alain (Paris FRX), Method for the optical alignment of designs in two near planes and alignment apparatus for performing this method.
  2. Feldman Martin (Murray Hill NJ) White Alan David (Berkeley Heights NJ), Zone plate alignment marks.

이 특허를 인용한 특허 (25)

  1. Adolfs Friedhelm (Ratingen DEX) Bittner Gerd (Bottrop DEX) Bsing Klaus P. (Datteln DEX) Harris Stephen (Ratingen DEX) Hahn Ulrich (Essen DEX) Wrzburger Martin (Essen DEX), Contactless optical process for identifying objects.
  2. Ebbesen Thomas W. ; Grupp Daniel E. ; Thio Tineke ; Lezec Henri J.,FRX, Enhanced optical transmission apparatus utilizing metal films having apertures and periodic surface topography.
  3. Thio, Tineke; Linke, Richard A.; Pellerin, Kelly M.; Ebbesen, Thomas W.; Lezec, Henri J., Enhanced optical transmission apparatus with improved aperture geometry.
  4. Kim Tae Jin ; Krishnan Ajit ; Thio Tineke ; Lezec Henri Joseph,FRX ; Ebbesen Thomas W.,FRX, Enhanced optical transmission apparatus with improved inter-surface coupling.
  5. Sokol, David W.; Walters, Craig T.; Housen, Kevin R.; Bossi, Richard H.; Toller, Steven M., Lamb waves for laser bond inspection.
  6. Tanaka Yoshiharu (Tokyo JPX) Kouno Eiichi (Tokyo JPX) Iwata Joji (Tokyo JPX), Method of alignment between mask and semiconductor wafer.
  7. Nishimoto Shozo (Tokyo JPX), Method of manufacturing a semiconductor device using a main vernier pattern formed at a right angle to a subsidiary vern.
  8. Ebbesen Thomas W. ; Ghaemi Hadi F. ; Thio Tineke ; Wolff Peter A., Near-field scanning optical microscope having a sub-wavelength aperture array for enhanced light transmission.
  9. Barry Robert F. (Monroeville PA) Kang Samuel (Monroeville PA), Object locating system.
  10. Leslie Brian C. ; Nikoonahad Mehrdad ; Wells Keith B., Optical scanning system for surface inspection.
  11. Leslie, Brian C.; Nikoonahad, Mehrdad; Wells, Keith B., Optical scanning system for surface inspection.
  12. Leslie,Brian C.; Nikoonahad,Mehrdad; Wells,Keith B., Optical scanning system for surface inspection.
  13. Leslie,Brian C.; Nikoonahad,Mehrdad; Wells,Keith B., Optical scanning system for surface inspection.
  14. Kim Tae Jin ; Thio Tineke ; Ebbesen Thomas Wren, Optical transmission control apparatus utilizing metal films perforated with subwavelength-diameter holes.
  15. Bergeron, Alain; Doucet, Michel; Prevost, Donald, Position encoding optical device and method.
  16. Jantke Gabriele,DEX ; Steckenborn Arno,DEX ; Winkler Thoralf,DEX, Process for determining the crystal orientation in a wafer.
  17. Nikoonahad, Mehrdad; Stokowski, Stanley E., Scanning system for inspecting anamolies on surfaces.
  18. Nikoonahad Mehrdad ; Stokowski Stanley E., Scanning system for inspecting anomalies on surfaces.
  19. Nikoonahad Mehrdad ; Stokowski Stanley E., Scanning system for inspecting anomalies on surfaces.
  20. Nikoonahad,Mehrdad; Stokowski,Stanley E., Scanning system for inspecting anomalies on surfaces.
  21. Ebbesen Thomas W. ; Ghaemi Hadi F. ; Thio Tineke ; Wolff Peter A., Sub-wavelength aperture arrays with enhanced light transmission.
  22. Jordan ; III John R. ; Nikoonahad Mehrdad ; Wells Keith B., Surface inspection system.
  23. Nikoonahad Mehrdad ; Wayman Charles E., Surface inspection system with misregistration error correction and adaptive illumination.
  24. Tineke Thio, Surface-plasmon enhanced photovoltaic device.
  25. Nikoonahad Mehrdad (Menlo Park CA) Tebelskis James A. (San Jose CA), Wafer alignment sensor.
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