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Method of making quartz glass crucibles, and apparatus carrying out the method

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C03P-019/04
출원번호 US-0247394 (1981-03-25)
우선권정보 DE-3014311 (1980-04-15)
발명자 / 주소
  • Brning Rolf (Bruchkbel DEX) Habegger Friedhelm (Hammersbach DEX)
출원인 / 주소
  • Heraeus Quarzschmelze GmbH (Hanau DEX 03)
인용정보 피인용 횟수 : 41  인용 특허 : 1

초록

To make quartz glass crucibles suitable for drawing of single crystal silicon for electronic semiconductor applications, granular crystalline quartz or amorphous quartz glass is introduced into a rotating hollow mold which has gas-pervious wall regions at the side walls and bottom thereof, for examp

대표청구항

Apparatus to manufacture crucibles made of quartz glass from granular particles of quartz, said crucibles being capable of being used in the manufacture of single-crystal silicon blanks for electronic semiconductor applications, said apparatus comprising a gas-tight housing (1); a hollow mold (4) ha

이 특허에 인용된 특허 (1)

  1. Book ; deceased Nils E. E. (late of Motala SEX by Inga Book ; administrator), Apparatus for surface embossing man-made lignocellulosic board.

이 특허를 인용한 특허 (41)

  1. Guibert Paul (Bellegarde FRX) Launay Francis A. P. (Pithiviers-le-Vieil FRX), Apparatus for extracting spin cast fused silica objects.
  2. Brown David R. (Beverly MA) Frost ; Jr. Charles E. (Exeter NH) White Kenneth A. (Raymond NH), Apparatus for making quartz glass crucibles.
  3. Fujita, Takeshi, Crucible lift device and method for taking-out crucible.
  4. Richard Joseph Phillips ; Larry E. Drafall ; Kirk D. McCallum, Crystal puller and method for growing monocrystalline silicon ingots.
  5. Bihuniak Peter P. (Shaker Heights OH) Dogunke Gordon E. (Cleveland OH) Shelley Robert D. (Chesterland OH), Fused quartz member for use in semiconductor manufacture.
  6. Sato Tatsuhiro,JPX ; Fujinoki Akira,JPX ; Inaki Kyoichi,JPX ; Yoshida Nobumasa,JPX ; Yokota Tohru,JPX, High purity opaque silica glass.
  7. Uchikawa Akira (Takefu JPX) Iwasaki Atsushi (Takefu JPX) Fukuoka Toshio (Sabae JPX) Matsumura Mitsuo (Takefu JPX) Matsui Hiroshi (Takefu JPX) Sato Yasuhiko (Annaka JPX) Aoyama Masaaki (Kouriyama JPX), Manufacture of a quartz glass vessel for the growth of single crystal semiconductor.
  8. Uchikawa Akira (Takefu JPX) Iwasaki Atsushi (Takefu JPX) Fukuoka Toshio (Sabae JPX) Matsumura Mitsuo (Takefu JPX) Matsui Hiroshi (Takefu JPX) Sato Yasuhiko (Annaka JPX) Aoyama Masaaki (Kouriyama JPX), Manufacture of a quartz glass vessel for the growth of single crystal semiconductor.
  9. Kishi, Hiroshi; Kanda, Minoru; Morikawa, Masaki, Method and apparatus for manufacturing vitreous silica crucible.
  10. Borens, Manfred; Eckes, Franz-Peter; Zborowski, Janus; Westernhagen, Karsten V.; Merolla, Stefano; Witte, Joerg; Kuester, Joachim; Holla, Marcus, Method and casting mold for manufacturing a quartz glass body.
  11. Clasen Rolf (Aachen DEX) Hermann Wilhelm G. (Roetgen DEX), Method for manufacturing glass bodies.
  12. Ikeda Tooru ; Asajima Kazuo,JPX ; Kimura Hiroshi,JPX ; Watanabe Hiroyuki,JPX, Method for producing a quartz glass crucible.
  13. Fukuda, Tsuguo; Kikuyama, Hirohisa; Satonaga, Tomohiko, Method for producing fluoride crystal.
  14. Kishi, Hiroshi; Kanda, Minoru, Method for producing quartz glass crucible.
  15. Hansen, Richard L.; Ahlgren, Frederic F.; Giddings, Robert A., Method for quartz crucible fabrication.
  16. Guibert Paul (Bellegarde FRX) Launay Francis A. P. (Pithiviers-le-Vieil FRX), Method of extracting spin cast fused silica.
  17. Kemmochi, Katsuhiko; Kayser, Thomas; Coolich, Robert Joseph; Lehmann, Walter, Method of making a silica crucible in a controlled atmosphere.
  18. Brown David R. (Beverly MA) Frost ; Jr. Charles E. (Exeter NH) White Kenneth A. (Raymond NH), Method of manufacturing quartz glass crucibles with low bubble content.
  19. Fujita, Takeshi; Kanda, Minoru, Method of producing vitreous silica crucible.
  20. Christman Marc A. ; Mosier Robert O., Methods and apparatus for minimizing white point defects in quartz glass crucibles.
  21. Hansen Richard L. ; Drafall Larry E. ; McCutchan Robert M. ; Holder John D. ; Allen Leon A. ; Shelley Robert D., Methods for improving zero dislocation yield of single crystals.
  22. Kemmochi, Katsuhiko; Togawa, Takayuki; Mosier, Robert; Spencer, Paul, Methods for making silica crucibles.
  23. Kimbel, Steven L.; Korb, Harold W.; Phillips, Richard J.; Rathod, Shailendra B., Methods for producing crucibles with a reduced amount of bubbles.
  24. Kimbel, Steven L.; Korb, Harold W.; Phillips, Richard J.; Rathod, Shailendra B., Methods for producing crucibles with a reduced amount of bubbles.
  25. Sato Tatsuhiro,JPX ; Fujinoki Akira,JPX ; Inaki Kyoichi,JPX ; Yoshida Nobumasa,JPX ; Yokota Tohru,JPX, Process for producing opaque silica glass.
  26. Morishita Hiroshi (Kanagawa JPX) Imayoshi Terukazu (Kanagawa JPX) Kikuchi Hitoshi (Kanagawa JPX) Nakamura Akihiro (Tokyo JPX), Process for the production of glass.
  27. Morishita Hiroshi (Kanagawa JPX) Imayoshi Terukazu (Kanagawa JPX) Kikuchi Hitoshi (Kanagawa JPX) Nakamura Akihiro (Tokyo JPX), Process for the production of glass.
  28. Morishita Hiroshi (Kanagawa JPX) Namikawa Hiroshi (Tokyo JPX) Koguchi Youji (Kanagawa JPX) Miyake Shin-Ichi (Tokyo JPX) Imayoshi Terukazu (Kanagawa JPX) Kikuchi Hitoshi (Kanagawa JPX) Nakamura Akihir, Process for the production of glass.
  29. Sato Tatsuhiro,JPX ; Mizuno Shigeo,JPX ; Matsumura Mitsuo,JPX ; Watanabe Hiroyuki,JPX, Quart crucible with large diameter for pulling single crystal and method of producing the same.
  30. Sato Tatsuhiro,JPX ; Mizuno Shigeo,JPX ; Matsumura Mitsuo,JPX ; Watanabe Hiroyuki,JPX, Quartz crucible with large diameter for pulling single crystal and method of producing the same.
  31. Hansen, Richard Lee; Kircher, Theodore P.; Devanathan, Narsi, Quartz glass crucible and method for treating surface of quartz glass crucible.
  32. Ohama, Yasuo, Quartz glass crucible for silicon single crystal pulling operation and process for manufacturing the same.
  33. Brown David R. (Beverly MA) Frost ; Jr. Charles E. (Exeter NH) White Kenneth A. (Raymond NH), Quartz glass crucibles.
  34. Kemmochi, Katsuhiko; Coolich, Robert Joseph, Silica crucible with pure and bubble free inner crucible layer and method of making the same.
  35. Kemmochi,Katsuhiko; Ohama,Yasuo, Silica glass crucible with barium-doped inner wall.
  36. Kemmochi,Katsuhiko; Mosier,Robert; Ohama,Yasuo, Silica glass crucible with bubble-free and reduced bubble growth wall.
  37. Kemmochi, Katsuhiko; Ohama, Yasuo, Silica vessel with nozzle and method of making.
  38. Taguchi Hiroaki,JPX ; Atami Takashi,JPX ; Furuya Hisashi,JPX ; Fukui Masanori,JPX ; Kida Michio,JPX, Single crystal pulling apparatus.
  39. Hansen Richard L. ; Drafall Larry E. ; McCutchan Robert M. ; Holder John D. ; Allen Leon A. ; Shelley Robert D., Surface-treated crucibles for improved zero dislocation performance.
  40. Bronson Timothy C. ; Rudolph Bruce G., System and method for detecting phase errors in asics with multiple clock frequencies.
  41. Kishi, Hiroshi, Vitreous silica crucible for pulling single-crystal silicon and method of manufacturing the same.

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