초록 ▼

A pressure transducer (26) is disclosed. A multiplicity of signal plates (Cs, Cr, Csf, Crf) are disposed on a first quartz disc (88). Opposing the signal plates (Cs, Cr, Csf, Crf) across a gap formed by an annular frit (92) is a common plate (94) disposed on a second quartz disc (86). The signal pla

A pressure transducer (26) is disclosed. A multiplicity of signal plates (Cs, Cr, Csf, Crf) are disposed on a first quartz disc (88). Opposing the signal plates (Cs, Cr, Csf, Crf) across a gap formed by an annular frit (92) is a common plate (94) disposed on a second quartz disc (86). The signal plates (Cs, Cr, Csf, Crf) and common plate (94) form capacitors which are operable to modulate alternating excitation signals applied to the signal plates. The capacitances vary the modulation during deflections of the discs (86, 88) as a result of pressure changes, and the common plate (94) algebraically sums the modulated excitation signals into a single output from the transducer (26).

대표청구항 ▼

A capacitive pressure transducer comprising: a first substrate of insulative material; a second substrate of insulative material; at least one of said substrates being flexible and deforming in response to a pressure change; a first signal plate of electrically conductive material formed on a surfac

A capacitive pressure transducer comprising: a first substrate of insulative material; a second substrate of insulative material; at least one of said substrates being flexible and deforming in response to a pressure change; a first signal plate of electrically conductive material formed on a surface of said first substrate; a second signal plate of electrically conductive material formed on said first substrate surface; a third signal plate of electrically conductive material formed on said first substrate surface; a fourth signal plate of electrically conductive material formed on said first substrate surface; a fifth common plate of electrically conductive material formed on a surface of said second substrate; said first and second substrates positioned from each other such that a gap exits between said plates on said first and second surfaces wherein first, second, third, and fourth capacitors are formed between said first, second, third, and fourth plates and said fifth plate, respectively, said fifth plate serving as a common plate for combining excitation signals input to said signal plates into a single signal; and wherein said signal plates are formed on said first substrate and said common plate is formed on said second substrate such that the capacitance versus pressure characteristics for said first, second, third, and fourth capacitors have a predetermined relationship which does not vary because of the production variables of the transducer.