초록 ▼

Device for cathode sputtering of at least two different materials, including a holder, a device for cooling the holder, a heat-conducting layer disposed on the holder, a target being connected to the holder with the heat-conducting layer disposed therebetween, the target being formed of one of the m

Device for cathode sputtering of at least two different materials, including a holder, a device for cooling the holder, a heat-conducting layer disposed on the holder, a target being connected to the holder with the heat-conducting layer disposed therebetween, the target being formed of one of the materials to be sputtered and the target having a plurality of blind holes formed therein, and pins formed of another material to be admixed in the sputtering being fitted in at least one of the blind holes.

대표청구항 ▼

Device for cathode sputtering of at least two different materials comprising a holder, means for cooling said holder, a heat-conducting layer disposed on said holder, a target connected to said holder with said heat-conducting layer disposed therebetween, said target being exchangeably screwed to sa

Device for cathode sputtering of at least two different materials comprising a holder, means for cooling said holder, a heat-conducting layer disposed on said holder, a target connected to said holder with said heat-conducting layer disposed therebetween, said target being exchangeably screwed to said holder said target being formed of one of the materials to be sputtered and having a plurality of blind holes formed therein, and pins formed of another material to be admixed in the sputtering being fitted in at least some of said blind holes.