초록 ▼

In a system for delivering vapor from a container partially filled with liquid to be vaporized by bubbling a carrier gas therethrough, the flow of the vapor is precisely regulated by a controller so as to provide a uniform mass flow rate of vapor. The controller is programmed to receive signals repr

In a system for delivering vapor from a container partially filled with liquid to be vaporized by bubbling a carrier gas therethrough, the flow of the vapor is precisely regulated by a controller so as to provide a uniform mass flow rate of vapor. The controller is programmed to receive signals representing the sensing of the total gaseous pressure, temperature and liquid level in the container and to use the signals in a computation according to the following formula: m*=AFc (1+BDDc+ED) wherein m*=Approximate vapor mass flow Fc=Carrier gas mass flow Do) Do) D

대표청구항 ▼

In a chemical vapor delivery system including a container partially filled with material to be vaporized and applied to a system which uses the vapor, means for ducting a carrier gas through said material to transport said vaporized material, a valve for controlling the flow of said carrier gas to s

In a chemical vapor delivery system including a container partially filled with material to be vaporized and applied to a system which uses the vapor, means for ducting a carrier gas through said material to transport said vaporized material, a valve for controlling the flow of said carrier gas to said container, and means for controlling the temperature of the material in said container, an improved method comprising: providing a continuous, uniform mass flow of said vaporized material to said using system by: sensing the total gaseous pressure (P) in said container; comparing said sensed pressure (P) with a reference pressure (Po) to provide a pressure differential (Do); generating a signal in a vapor mass flow controller utilizing said pressure differential (Do) to provide a pressure differential (Do), said controller generating a signal in a computation wherein, as the differential (D