초록 ▼

Apparatus for transferring wafers between storage magazines and processing trays. The trays are mounted on a generally cylindrical carousel which is rotated about its axis to bring successive ones of the trays into position for loading wafers on to the trays and unloading wafers from the trays. An e

Apparatus for transferring wafers between storage magazines and processing trays. The trays are mounted on a generally cylindrical carousel which is rotated about its axis to bring successive ones of the trays into position for loading wafers on to the trays and unloading wafers from the trays. An elevator assembly is mounted within the carousel and is moveable in an axial direction for alignment with different wafer holding positions which are spaced along the trays. The storage magazines are mounted on the elevator assembly, and wafer transfer blades transfer the wafers between the magazines and radially moveable chucks which carry the wafers to and from the wafer holding positions in the trays.

대표청구항 ▼

Apparatus for transferring wafers between a storage magazine and processing trays having a plurality of wafer holding positions spaced along the same, comprising a multifaceted generally cylindrical carousel on which the trays are removably mounted with the wafer holding positions aligned generally

Apparatus for transferring wafers between a storage magazine and processing trays having a plurality of wafer holding positions spaced along the same, comprising a multifaceted generally cylindrical carousel on which the trays are removably mounted with the wafer holding positions aligned generally parallel to the axis of the carousel, drive means for rotating the carousel about its axis to bring successive ones of the trays into a predetermined wafer loading position, an elevator assembly mounted within the carousel for movement in the axial direction between the wafer holding positions, wafer holding chuck means mounted on the elevator assembly for movement in a radial direction toward and from a tray in the wafer loading position, and means for transferring the wafers between the storage magazine and the chuck means.