초록 ▼

An apparatus comprising a rotating substrate holder is provided. The rotating substrate holder is hollow and adapted to receive liquid gas such as nitrogen to cool the substrate to cryogenic temperatures. The novel substrate holder is supported inside of a vacuum chamber by a thin wall tube which is

An apparatus comprising a rotating substrate holder is provided. The rotating substrate holder is hollow and adapted to receive liquid gas such as nitrogen to cool the substrate to cryogenic temperatures. The novel substrate holder is supported inside of a vacuum chamber by a thin wall tube which is sealed with a liquid rotating seal at the point where it passes completely through the top wall of the vacuum chamber. The novel thin wall tube support provides access to the hollow substrate holder from outside the vacuum chamber and provides temperature isolation of the liquid in the substrate holder so that the liquid rotating seals are maintained at operable elevated temperatures.

대표청구항 ▼

Apparatus for rotating a substrate in a vacuum chamber at cryogenic temperatures, comprising: a vacuum chamber, a top on said vacuum chamber, an aperture in said top of said vacuum chamber, a closure mounted on said aperture of said top of said vacuum chamber, magnetic means fixed in a recess in sai

Apparatus for rotating a substrate in a vacuum chamber at cryogenic temperatures, comprising: a vacuum chamber, a top on said vacuum chamber, an aperture in said top of said vacuum chamber, a closure mounted on said aperture of said top of said vacuum chamber, magnetic means fixed in a recess in said closure, said magnetic means comprising a plurality of annular shaped magnets, a thin wall hollow metal tube mounted through the center of said magnets for rotary movement relative thereto, ferro-fluid seal means intermediate said magnets and said thin wall hollow tube, a work station mounted on one end of said thin wall hollow tube and cooperating therewith, said work station comprising a hollow chamber adapted to receive cold-liquified gas at cryogenic temperatures therein, said work station having means for holding a work piece thereon in close proximity to said cold-liquified gas in said hollow chamber of said work station, and drive means coupled to said thin wall hollow tube for rotating said thin wall hollow tube and said work station while maintaining said work station hollow chamber below 100°Kelvin and said ferro-fluid seal above freezing temperature.