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Method for forming photovoltaic cells employing multinary semiconductor films

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-015/00
  • H01L-031/18
출원번호 US-0470418 (1983-02-28)
발명자 / 주소
  • Love Robert B. (Chatsworth CA) Choudary Uppala V. (Chatsworth CA)
출원인 / 주소
  • Atlantic Richfield Company (Los Angeles CA 02)
인용정보 피인용 횟수 : 119  인용 특허 : 1

초록

At least two constituent elements of a semiconductor compound are deposited in varying proportions by magnetron sputtering to produce a film having a preselected concentration gradient of the constituent elements. The film can be heat treated during or after deposition to diffuse the constituent ele

대표청구항

A method for use in the manufacture of photovoltaic cells having a film of a Cu-ternary semiconductor compound made up of a plurality of constituent elements, comprising the steps of: magnetron sputtering at least two constituent elements of the Cu-ternary compound simultaneously onto a substrate in

이 특허에 인용된 특허 (1)

  1. Ijaz Lubna R. (P.O. Box 158 Christiansburg VA 24073) Burton Larry C. (P.O. Box 158 Christiansburg VA 24073), Radiant energy converter having sputtered CdSiAs2 absorber.

이 특허를 인용한 특허 (119)

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