초록 ▼

A high velocity stream of gas comprising of either the carrier gas or one or more film forming or removing components is shot through a shooting means such as a nozzle or orifice in the form of a high speed stream of gas in a chemical vapor deposition growth chamber or within an attachment receiving

A high velocity stream of gas comprising of either the carrier gas or one or more film forming or removing components is shot through a shooting means such as a nozzle or orifice in the form of a high speed stream of gas in a chemical vapor deposition growth chamber or within an attachment receiving reaction gases from such a chamber. This gas or mixture of gases entrains all of the adjacent gases within the vicinity of the shooting nozzle or orifice and is subsequently swept through a diffusion tube. The diffusion tube compresses and exhausts the gas mixture at a pressure sufficient to drive the combined gas mixture through a heat exchanger and finally back into the growth chamber. The gases within the growth chamber are provided for entrainment downstream to a heated base or substrate which is being coated with a thin film or epitaxial layer of film forming components contained in a carrier gas. The entrained temperature adjusted gas mixture together with the high velocity gas mixture is reintroduced upstream of the same heated base or substrates in the growth chamber.

대표청구항 ▼

A method of removing a thin film from the surface of a substrate through a chemical reaction of film removing components contained in a gas contacted with the substrate surface in a reaction zone which comprises: forming a high velocity stream of gas comprising one or more film removing components b

A method of removing a thin film from the surface of a substrate through a chemical reaction of film removing components contained in a gas contacted with the substrate surface in a reaction zone which comprises: forming a high velocity stream of gas comprising one or more film removing components by shooting said gas through a jetting means in the form of a high speed gas stream on the down stream side of said reaction zone.