초록 ▼

Optical filters, e.g. for reflecting infrared radiation while passing visible light radiation is made by applying to the silver reflective coating a protective coating of a metal oxide by magnetron cathode sputtering and only thereafter is the dereflective layer applied by magnetron cathode sputteri

Optical filters, e.g. for reflecting infrared radiation while passing visible light radiation is made by applying to the silver reflective coating a protective coating of a metal oxide by magnetron cathode sputtering and only thereafter is the dereflective layer applied by magnetron cathode sputtering. The protective coating-oxygen partial pressure and coating rate are substantially less than the dereflective coating-oxygen partial pressure and coating rate. Apparently the protective coating prevents damage to the reflective coating.

대표청구항 ▼

A method of coating a transparent substrate with a multilayer optical filter which comprises the steps of: (a). applying a reflective silver coating to said substrate; (b). thereafter applying a protective coating to said silver coating of a metal oxide by magnetron cathode sputtering at an S protec

A method of coating a transparent substrate with a multilayer optical filter which comprises the steps of: (a). applying a reflective silver coating to said substrate; (b). thereafter applying a protective coating to said silver coating of a metal oxide by magnetron cathode sputtering at an S protective coating rate and in an S protective coating partial pressure; (c). thereafter applying by magnetron cathode sputtering a dereflective metal oxide coating at an E dereflective coating-oxygen partial pressure and at an E dereflective coating rate; and (d). controlling the coating rates during the application of said protective and dereflective coating so that the S partial pressure is less than the E partial pressure and the S coating rate is less than the E coating rate.