초록 ▼

A bakeable cryopump having a housing and means to removeably receive the displacer end of a cryogenic refrigerator to cool internal cryopanels said cryopumps adapted for removal of the refrigerator without loss of vacuum inside the cryopump and further adapted to be heated under vacuum to remove pum

A bakeable cryopump having a housing and means to removeably receive the displacer end of a cryogenic refrigerator to cool internal cryopanels said cryopumps adapted for removal of the refrigerator without loss of vacuum inside the cryopump and further adapted to be heated under vacuum to remove pumped gases primarily water so that the cryopumps after cooling can be used at vacuum of at least 10-10 Torr.

대표청구항 ▼

A bakeable cryopump comprising in combination: a flange designed for mounting said cryopump to a vacuum chamber normally operated at vacuums of 10-10 torr or below; a generally cylindrical refrigerator housing fixed to said flange, said refrigerator housing designed and arranged to receive a two-sta

A bakeable cryopump comprising in combination: a flange designed for mounting said cryopump to a vacuum chamber normally operated at vacuums of 10-10 torr or below; a generally cylindrical refrigerator housing fixed to said flange, said refrigerator housing designed and arranged to receive a two-stage displacer-expander refrigerator head so that a coldest stage of said refrigerator head can be brought in thermal contact with a closed end of said refrigerator housing said refrigerator removable from said housing without loss of vacuum inside said cryopump, said refrigerator housing further designed and arranged in combination with a thermal transfer media contained in said housing at approximately 1 atmosphere pressure to thermally contact a warmer stage of said refrigerator; at least one cryopanel fixed to said closed end of the refrigerator housing said cryopanel including means to minimize radiant heat loads and to cryopump hydrogen, said housing and said cryopanel fabricated from materials and by methods to minimize out-gassing of the structure under vacuum; said refrigerator head being designed to be readily removed from said refrigerator housing and said cryopump housing heated to temperatures above 200°C. under vacuum conditions to remove adsorbed gases from said cryopanel.