IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
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출원번호 |
US-0541559
(1983-10-13)
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발명자
/ 주소 |
- Hirvonen James K. (Rockport MA) Wittkower Andrew B. (Rockport MA) Denholm A. Stuart (Sherman CT)
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출원인 / 주소 |
- Zymet, Inc. (Danvers MA 02)
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인용정보 |
피인용 횟수 :
13 인용 특허 :
7 |
초록
▼
A method of controlling the temperature of an article comprised of predetermined material during treatment of the article in vacuum comprises providing a heat conductive substance having a solid, rigid state at the temperature of the treatment, having a molten state at a higher temperature below the
A method of controlling the temperature of an article comprised of predetermined material during treatment of the article in vacuum comprises providing a heat conductive substance having a solid, rigid state at the temperature of the treatment, having a molten state at a higher temperature below the minimum damage temperature of the article, and being chemically nonreactive, nonwetting and nonadhesive at the higher temperature with a first portion of the article. The first portion of the article to be treated is immersed in molten heat conductive substance, a second portion of the article to be treated remaining unimmersed, exposed for treatment, and the substance is caused to solidify about the immersed first portion. The solid heat conductive substance is maintained in heat conductive relationship with a temperature control surface, and the exposed second portion of the article is treated in vacuum while the temperature of the surface and thereby, via the heat conductive substance, the temperature of the article is controlled during treatment. Thereafter, following treatment, the heat conductive substance is reheated to cause the substance to be in molten state, and the treated article is removed. In one aspect, the method involves controlling the temperature of an article during treatment with ion beams under vacuum of pressure of the order of 10-5 torr. Apparatus is also described.
대표청구항
▼
A method of controlling the temperature of an article, the shape of which may vary, while exposing a selected portion of it to treatment under vacuum by an energetic beam, said method comprising providing, within a container, a heat conductive substance of selected depth having a solid rigid state u
A method of controlling the temperature of an article, the shape of which may vary, while exposing a selected portion of it to treatment under vacuum by an energetic beam, said method comprising providing, within a container, a heat conductive substance of selected depth having a solid rigid state under conditions of said treatment and having a molten state at a higher temperature below the minimum damage temperature of said article, said substance being chemically nonreactive, nonwetting and nonadhesive at said higher temperature with a first portion of said article, heating said heat conductive substance to said higher temperature to cause said substance to be in molten state, temporarily holding said article in selected position to submerge said first portion of said article substantially below the surface of said molten heat conductive substance while a second portion of said article to be treated protrudes above said surface, cooling said heat conductive substance to cause it to solidify about said immersed first portion of said article in intimate heat conducting and rigid supporting relationship therewith, with said second portion of said articles protruding above said surface, in position for exposure to said beam, subjecting said exposed second portion under vacuum to said energetic beam for said treatment while controlling the temperature of said article by heat transfer via said intimately engaged, rigid supporting substance, and, thereafter following said treatment, reheating said rigid substance to said higher temperature to cause said substance to be in molten state, and removing the treated article therefrom. An apparatus for controlling the temperature of an article, the shape of which may vary, while a portion of said article is exposed to a predetermined treatment by an ion energetic beam, said apparatus comprising: a container, and within said container, a heat conductive substance of selected depth having a solid, rigid state under the conditions of said treatment and having a molten state at the temperature below the minimum damage temperature of said article, said substance being chemically nonreactive, nonwetting and nonadhesive at said higher temperature with a first, support portion of said article, said contained substance being adapted, in molten state to submersibly receive said first support portion of said article substantially below the surface of said molten heat conductive substance while leaving a second portion of said article to be treated exposed above said surface in selected position, said substance being further adapted, upon cooling, to solidify about said immersed first, support portion of said article in intimate heat conducting and rigid supporting relationship therewith, with said second portion of said article protruding above said surface, in selected position for exposure to said beam, whereby, said rigid heat conductive substance permits control of the temperature and accurate angular positioning of said article during treatment with said energetic ion beam in vacuum.
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