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Particle-free dockable interface for integrated circuit processing 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65B-001/04
출원번호 US-0536600 (1983-09-28)
발명자 / 주소
  • Tullis Barclay J. (Palo Alto CA) Parikh Mihir (San Jose CA) Thrasher David L. (Menlo Park CA) Johnston Mark E. (Saratoga CA)
출원인 / 주소
  • Hewlett-Packard Company (Palo Alto CA 02)
인용정보 피인용 횟수 : 75  인용 특허 : 5

초록

A particle-free dockable interface is disclosed for linking together two spaces each enclosing a clean air environment. The interface is composed of interlocking doors on each space which fit together to trap particles which have accumulated from the dirty ambient environment on the outer surfaces o

대표청구항

An interface between first and second containers comprising: alignment means for orienting the first container in a fixed position relative to the second container; a first door for independently sealing the first container; a second door for independently sealing the second container; said first an

이 특허에 인용된 특허 (5)

  1. Hackney Stanley (Appleton GB2), Apparatus for transferring toxic and radioactive materials.
  2. Glachet Charles (Vendome FRX), Bidirectional joining device.
  3. Okaya ; Akira, Connector method and apparatus for coupling two systems together while excluding the environment from the system interi.
  4. Goutard Rene (Verrieres le Buisson FRX) Levardon Raymond (Paris FRX), Device for transferring and packaging contaminants such as radioactive products within a leak-tight sheath.
  5. Dorenbos Frederick William (El Cerrito CA), Workpiece handling system for vacuum processing.

이 특허를 인용한 특허 (75)

  1. Tullis Barclay J. (Palo Alto CA) Bailey John S. (Sunnyvale CA) Gunawardena D. R. (Union City CA) Kaempf Ulrich (Los Altos CA), Apparatus for automated cassette handling.
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  3. Lafond Andre,FRX, Automatic assembler/disassembler apparatus adapted to pressurized sealable transportable containers.
  4. Lafond Andre,FRX, Automatic assembler/disassembler apparatus adapted to pressurized sealable transportable containers.
  5. Maney George A. (Palo Alto CA) Faraco W. George (Saratoga CA) Parikh Mihir (San Jose CA), Box door actuated retainer.
  6. Miyajima, Toshihiko; Ishiyama, Shigeki, Clean device with clean box-opening/closing device.
  7. Bhatt, Sanjiv M.; Eggum, Shawn D., Composite substrate carrier.
  8. Bhatt, Sanjiv M.; Eggum, Shawn D., Composite substrate carrier.
  9. Bhatt,Sanjiv M.; Eggum,Shawn D., Composite substrate carrier.
  10. Akins Vaughn E. (Austin TX), Container for use within a clean environment.
  11. Boris Fishkin ; Seiji Sato ; Robert B. Lowrance, Controlled environment enclosure and mechanical interface.
  12. Murata Masanao (Ise JPX) Yamashita Teppei (Ise JPX) Tanaka Tsuyoshi (Ise JPX) Morita Teruya (Ise JPX) Oyobe Hiroyuki (Ise JPX), Conveying system.
  13. Hara, Shiro, Coupling system.
  14. Hara, Shiro; Maekawa, Hitoshi, Coupling transfer system.
  15. Hara, Shiro; Maekawa, Hitoshi, Coupling transfer system.
  16. Sacca, Giuseppe, Externally operated alpha port system for use with a rapid transfer port.
  17. Frederick T. Rosenquist, FIMS interface without alignment pins.
  18. Chiu, Ming-Chien; Lu, Pao-Yi; Hung, Kuo Chun, FOUP and robotic flange thereof.
  19. DeAngelis, Robert L.; Gallagher, Gary M., Gas purge system for isolation enclosure for contamination sensitive items.
  20. Cook Lawrence G. (Indianapolis IN) Florence ; Jr. Robert F. (Poughkeepsie NY) Gallagher Gary M. (Wappingers Falls NY) Johnson Gordon E. (Redding CT) Sargent Robert W. (LaGrangeville NY), Isolation structure for contamination sensitive items.
  21. Fosnight William J. ; Shenk Joshua W. ; Peterson Perry, Kinematic coupling compatible passive interface seal.
  22. Bonora, Anthony C., Laterally floating latch hub assembly.
  23. Donohoe Kevin G., Liner for use in processing chamber.
  24. Donohoe, Kevin G., Liner for use in processing chamber.
  25. Donohoe,Kevin G., Liner for use in processing chamber.
  26. Kevin G. Donohoe, Liner for use in processing chamber.
  27. Lee,Jin Goo, Load-lock and semiconductor device manufacturing equipment comprising the same.
  28. Bonora Anthony C. (Menlo Park CA) O\Sullivan Andrew W. (Gilroy CA), Long arm manipulator for standard mechanical interface apparatus.
  29. Yamazaki, Shunpei; Matsuda, Noriyuki, Manufacturing method and method for operating treatment apparatus.
  30. Yamazaki, Shunpei; Matsuda, Noriyuki, Manufacturing method by treating substrate introduced into treatment apparatus from transfer container.
  31. Giles Brian A. (Honeoye Falls NY) Schwab Frederick J. (Churchville NY), Method and apparatus for cleaning semiconductor wafers.
  32. Salg Tams (Budapest HUX), Method and apparatus for producing discharge tubes for sodium vapor lamps.
  33. Matsumoto, Ken, Method for transporting substrates and a semiconductor manufacturing apparatus using the method.
  34. Iwama Tatsuyuki,JPX, Method of controlling monitor used in cleaning machine and object processing machine and monitor apparatus.
  35. Fosnight William J., Modular SMIF pod breather, adsorbent, and purge cartridges.
  36. Fosnight,William J., Modular SMIF pod breather, adsorbent, and purge cartridges.
  37. Babbs, Daniel; Ewald, Timothy; Coady, Matthew; Fosnight, William J., Modular sorter.
  38. , Particle-free dockable interface for integrated circuit processing.
  39. Rosenquist, Frederick T.; Ng, Michael, Pod door to port door retention system.
  40. Bhatt, Sanjiv M.; Eggum, Shawn D., Process for fabricating composite substrate carrier.
  41. CletusWittman,Boyd, Reticle carrier.
  42. Anthony C. Bonora ; William J. Fosnight ; Joshua W. Shenk, Reticle transfer system.
  43. Bonora Anthony C. ; Fosnight William J. ; Martin Raymond S., Rotated, orthogonal load compatible front-opening interface.
  44. Smith, Mark V.; Wartenbergh, Robert P.; Pennybacker, William P., SMIF container latch mechanism.
  45. Bonora Anthony C. (Menlo Park CA) Rosenquist Frederick T. (Redwood City CA), Sealable transportable container having improved latch mechanism.
  46. Maney George A. (Palo Alto CA) O\Sullivan Andrew W. (Gilroy CA) Faraco W. George (Saratoga CA), Sealed standard interface apparatus.
  47. Yamada, Kohei, Semiconductor fabrication apparatus, pod carry apparatus, pod carry method, and semiconductor device production method.
  48. Ken Matsumoto JP, Semiconductor manufacturing apparatus and method.
  49. Matsumoto, Ken, Semiconductor manufacturing apparatus and method.
  50. Harada Hiroshi (Tokyo JPX) Iwasawa Yoshiyuki (Tokyo JPX) Ishida Tsutomu (Tokyo JPX) Kobayashi Shintaro (Tokyo JPX), Semiconductor processing system.
  51. Millis Edwin G. (Dallas TX) Bimer Thomas C. (Albuquerque NM) Lewis Alton D. (Garland TX), Semiconductor slice cassette transport unit.
  52. Gallagher Gary M. (Colorado Springs CO) Wittman Boyd C. (Colorado Springs CO) Neumann Edmund B. (Corvallis OR), Semiconductor wafer cassette transport box.
  53. Bonora Anthony C. (Menlo Park CA), Short arm manipulator for standard mechanical interface apparatus.
  54. Wu Hong Jen (Hsin chu TWX) Chen Taylor (Hsin chu TWX) Lai Jack (Hsin chu TWX) Chen I. I. (Hsin chu TWX), Single semiconductor wafer transfer method and manufacturing system.
  55. Wu Hong-Jen,TWX ; Chen Taylor,TWX ; Lai Jack,TWX ; Chen I. I.,TWX, Single semiconductor wafer transfer method and manufacturing system.
  56. Martin, Raymond S., Smart load port with integrated carrier monitoring and fab-wide carrier management system.
  57. Kinkead Devon A. ; Joffe Michael A., Storing substrates between process steps within a processing facility.
  58. Burns,John; Fuller,Matthew A.; King,Jeffery J.; Forbes,Martin L.; Smith,Mark V.; Zabka,Michael, Substrate carrier.
  59. Hofmeister Christopher, Substrate carrier as batchloader.
  60. Matsuoka, Takaaki; Iwabuchi, Katsuhiko; Ishizawa, Shigeru; Hiroki, Tsutomu, Substrate processing device.
  61. Hara, Shiro; Maekawa, Hitoshi, Substrate transfer antechamber mechanism.
  62. Matsumoto,Ken, Substrate transfer apparatus, semiconductor manufacturing apparatus, and semiconductor device manufacturing method.
  63. Bonora, Anthony C.; Gallagher, Gary M.; Ng, Michael, System for preventing improper insertion of FOUP door into FOUP.
  64. Fosnight, William J.; Babbs, Daniel; Gould, Richard; Krolak, Michael; Feindel, David; Luong, Timothy, System for safeguarding integrated intrabay pod delivery and storage system.
  65. Walker Delroy (Springdale MD) Zihmer Joseph (Frederick MD) Furches Danny (Columbia MD) Garmer Christopher J. (Rockville MD), System for transferring articles between controlled environments.
  66. Lorenzelli Robert (Saint-Remy-les-Chevreuses FRX) Dabernard Pierre (Gif sur Yvette FRX) Maire Christian (Bures-sur-Yvette FRX), Transfer device with a double tight barrier between a container and a confinement enclosure.
  67. Nyseth David L. ; Krampotich Dennis J. ; Ulschmid Todd M. ; Bores Gregory W., Transport module.
  68. Nyseth, David L.; Krampotich, Dennis J.; Ulschmid, Todd M.; Bores, Gregory W., Transport module.
  69. Nyseth,David L.; Krampotich,Dennis J.; Ulschmid,Todd M.; Bores,Gregory W., Transport module.
  70. Speasl, Jerry A.; Dante, Edward, Transportable container including an internal environment monitor.
  71. Speasl,Jerry A.; Dante,Edward, Transportable container including an internal environment monitor.
  72. Speasl,Jerry A.; Dante,Edward, Transportable container including an internal environment monitor.
  73. Bonora Anthony C. ; Cortez Edward J. ; DiPaola J. Mark ; Netsch Robert R., Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications.
  74. Rosenquist Frederick T. ; Richardson Bruce ; Fosnight William J. ; Bonora Anthony C., Wafer mapping system.
  75. Hara, Shiro, Yellow room system.
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