초록 ▼

In a vacuum system for processing workpieces, a vacuum chamber has a workpiece-entrance opening. Load lock means for said entrance opening include a door for sealing the outside of said opening, a movable closure member within the chamber to seal the entrance opening from the interior of the vacuum

In a vacuum system for processing workpieces, a vacuum chamber has a workpiece-entrance opening. Load lock means for said entrance opening include a door for sealing the outside of said opening, a movable closure member within the chamber to seal the entrance opening from the interior of the vacuum chamber, and forming a load lock chamber when the door and closure member are both in closed positions. The load lock chamber is connected to a roughing pump and is separately connected to a high vacuum pump through a pumping opening in one or the other of said internal closure member or said door. A large aperture valve is provided in said pumping opening. In one embodiment said pumping opening is connected via suitable conduits and valves to a roughing pump and also to a high vacuum pump. In another embodiment said pumping opening is connected only to the high vacuum pump, and the roughing pump is connected to the load lock chamber via an aperture in the edge of the entrance opening in the processing chamber wall.

대표청구항 ▼

A pumping mechanism for a vacuum chamber comprising: a load lock having a front closure means through which a workpiece is inserted into said chamber and a rear closure means; said rear closure means having wall means forming a movable mini-chamber which forms a connection with an external pumping m

A pumping mechanism for a vacuum chamber comprising: a load lock having a front closure means through which a workpiece is inserted into said chamber and a rear closure means; said rear closure means having wall means forming a movable mini-chamber which forms a connection with an external pumping means, said mini-chamber including sealing means with said load lock and a ram whereby to close said rear closure means; and valve means including a sealing plate with sealing means inside said mini-chamber whereby to seal said load lock from said pumping means, said valve means including an actuator for moving said sealing plate.