$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Interlocking door latch for dockable interface for integrated circuit processing 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65B-001/00
출원번호 US-0594498 (1984-03-29)
발명자 / 주소
  • Tullis Barclay J. (Palo Alto CA) ..AP: Hewlett-Packard Company (Palo Alto CA 02)
인용정보 피인용 횟수 : 61  인용 특허 : 5

초록

A particle-free dockable interface with an interlocking latch is disclosed for linking together two spaces each enclosing a clean air environment and preventing the opening of the interface without the presences of two mating system components. The interface comprises interlocking doors on each spac

대표청구항

An interface between first and second containers comprising: alignment means for orienting the first container in a fixed position relative to the second container; a first door for independently sealing the first container; a second door for independently sealing the second container; said first an

이 특허에 인용된 특허 (5)

  1. Hackney Stanley (Appleton GB2), Apparatus for transferring toxic and radioactive materials.
  2. Glachet Charles (Vendome FRX), Bidirectional joining device.
  3. Okaya ; Akira, Connector method and apparatus for coupling two systems together while excluding the environment from the system interi.
  4. Goutard Rene (Verrieres le Buisson FRX) Levardon Raymond (Paris FRX), Device for transferring and packaging contaminants such as radioactive products within a leak-tight sheath.
  5. Dorenbos Frederick William (El Cerrito CA), Workpiece handling system for vacuum processing.

이 특허를 인용한 특허 (61)

  1. Tullis Barclay J. (Palo Alto CA) Bailey John S. (Sunnyvale CA) Gunawardena D. R. (Union City CA) Kaempf Ulrich (Los Altos CA), Apparatus for automated cassette handling.
  2. Sperinck William A. (Warrington GB2) Ashcroft Keith C. (Chorley GB2), Apparatus for posting materials into and out of enclosures.
  3. Conboy Michael R. ; Shedd Danny C. ; Coss ; Jr. Elfido, Automated material handling system for a manufacturing facility divided into separate fabrication areas.
  4. Conboy,Michael R.; Shedd,Danny C.; Coss, Jr.,Elfido, Automated material handling system for a manufacturing facility divided into separate fabrication areas.
  5. Maney George A. (Palo Alto CA) Faraco W. George (Saratoga CA) Parikh Mihir (San Jose CA), Box door actuated retainer.
  6. Koike Hisashi (Yamanashi JPX) Tanaka Sumi (Kofu JPX), Carrier for transferring plate-like objects one by one, a handling apparatus for loading or unloading the carrier, and a.
  7. Masujima Sho,JPX ; Miyauchi Eisaku,JPX ; Miyajima Toshihiko,JPX ; Watanabe Hideaki,JPX, Clean transfer method and apparatus therefor.
  8. Masujima Sho,JPX ; Miyauchi Eisaku,JPX ; Miyajima Toshihiko,JPX ; Watanabe Hideaki,JPX, Clean transfer method and apparatus therefor.
  9. Wurst Manfred P. (Stuttgart DEX) Simon Rudolf (Korntal-Muenchingen DEX) Kahlden Thomas V. (Stuttgart DEX), Container for the handling of semiconductor devices and process for particle-free transfer.
  10. Akins Vaughn E. (Austin TX), Container for use within a clean environment.
  11. Boris Fishkin ; Seiji Sato ; Robert B. Lowrance, Controlled environment enclosure and mechanical interface.
  12. Salzman Philip M. (San Jose CA), Enclosure for load lock interface.
  13. Ren, Daqing, Equipment platform system and wafer transfer method thereof.
  14. Sacca, Giuseppe, Externally operated alpha port system for use with a rapid transfer port.
  15. Frederick T. Rosenquist, FIMS interface without alignment pins.
  16. Jones James (Warrington GBX), Flask assembly for contaminated objects.
  17. Fosnight William J. ; Shenk Joshua W. ; Peterson Perry, Kinematic coupling compatible passive interface seal.
  18. Bonora, Anthony C., Laterally floating latch hub assembly.
  19. Giles Brian A. (Honeoye Falls NY) Schwab Frederick J. (Churchville NY), Method and apparatus for cleaning semiconductor wafers.
  20. Matsumoto, Ken, Method for transporting substrates and a semiconductor manufacturing apparatus using the method.
  21. Iwama Tatsuyuki,JPX, Method of controlling monitor used in cleaning machine and object processing machine and monitor apparatus.
  22. Fosnight William J., Modular SMIF pod breather, adsorbent, and purge cartridges.
  23. Fosnight,William J., Modular SMIF pod breather, adsorbent, and purge cartridges.
  24. Babbs, Daniel; Ewald, Timothy; Coady, Matthew; Fosnight, William J., Modular sorter.
  25. , Particle-free dockable interface for integrated circuit processing.
  26. Rosenquist, Frederick T.; Ng, Michael, Pod door to port door retention system.
  27. CletusWittman,Boyd, Reticle carrier.
  28. Anthony C. Bonora ; William J. Fosnight ; Joshua W. Shenk, Reticle transfer system.
  29. Bonora Anthony C. ; Fosnight William J. ; Martin Raymond S., Rotated, orthogonal load compatible front-opening interface.
  30. Smith, Mark V.; Wartenbergh, Robert P.; Pennybacker, William P., SMIF container latch mechanism.
  31. Bonora Anthony C. (Menlo Park CA) Rosenquist Frederick T. (Redwood City CA), Sealable transportable container having improved latch mechanism.
  32. Maney George A. (Palo Alto CA) O\Sullivan Andrew W. (Gilroy CA) Faraco W. George (Saratoga CA), Sealed standard interface apparatus.
  33. Yamada, Kohei, Semiconductor fabrication apparatus, pod carry apparatus, pod carry method, and semiconductor device production method.
  34. Ken Matsumoto JP, Semiconductor manufacturing apparatus and method.
  35. Matsumoto, Ken, Semiconductor manufacturing apparatus and method.
  36. Millis Edwin G. (Dallas TX) Bimer Thomas C. (Albuquerque NM) Lewis Alton D. (Garland TX), Semiconductor slice cassette transport unit.
  37. Gallagher Gary M. (Colorado Springs CO) Wittman Boyd C. (Colorado Springs CO) Neumann Edmund B. (Corvallis OR), Semiconductor wafer cassette transport box.
  38. Wu Hong Jen (Hsin chu TWX) Chen Taylor (Hsin chu TWX) Lai Jack (Hsin chu TWX) Chen I. I. (Hsin chu TWX), Single semiconductor wafer transfer method and manufacturing system.
  39. Wu Hong-Jen,TWX ; Chen Taylor,TWX ; Lai Jack,TWX ; Chen I. I.,TWX, Single semiconductor wafer transfer method and manufacturing system.
  40. Martin, Raymond S., Smart load port with integrated carrier monitoring and fab-wide carrier management system.
  41. Kinkead Devon A. ; Joffe Michael A., Storing substrates between process steps within a processing facility.
  42. Burns,John; Fuller,Matthew A.; King,Jeffery J.; Forbes,Martin L.; Smith,Mark V.; Zabka,Michael, Substrate carrier.
  43. Hofmeister Christopher, Substrate carrier as batchloader.
  44. Sugawara, Eiichi, Substrate processing apparatus.
  45. Sugawara, Eiichi, Substrate processing apparatus.
  46. Matsumoto,Ken, Substrate transfer apparatus, semiconductor manufacturing apparatus, and semiconductor device manufacturing method.
  47. Bonora, Anthony C.; Gallagher, Gary M.; Ng, Michael, System for preventing improper insertion of FOUP door into FOUP.
  48. Fosnight, William J.; Babbs, Daniel; Gould, Richard; Krolak, Michael; Feindel, David; Luong, Timothy, System for safeguarding integrated intrabay pod delivery and storage system.
  49. Walker Delroy (Springdale MD) Zihmer Joseph (Frederick MD) Furches Danny (Columbia MD) Garmer Christopher J. (Rockville MD), System for transferring articles between controlled environments.
  50. Barrows, John F., Transfer port for movement of materials between clean rooms.
  51. Nyseth David L. ; Krampotich Dennis J., Transport module with latching door.
  52. Speasl, Jerry A.; Dante, Edward, Transportable container including an internal environment monitor.
  53. Speasl,Jerry A.; Dante,Edward, Transportable container including an internal environment monitor.
  54. Speasl,Jerry A.; Dante,Edward, Transportable container including an internal environment monitor.
  55. Tepman Avi ; Lowrance Robert B., Two-piece slit valve insert for vacuum processing system.
  56. Bonora Anthony C. ; Cortez Edward J. ; DiPaola J. Mark ; Netsch Robert R., Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications.
  57. Nyseth David L., Wafer carrier.
  58. Nyseth David L., Wafer carrier with door.
  59. Nyseth, David L., Wafer container with minimal contact.
  60. Rosenquist Frederick T. ; Richardson Bruce ; Fosnight William J. ; Bonora Anthony C., Wafer mapping system.
  61. Baker Gregory G. (Gig Harbor WA) Boyle Edward F. (Gig Harbor WA), Wafer monitoring device.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로