초록 ▼

A vibration isolator is disclosed to mount a cryopump expander module or other vibrating equipment on a vacuum housing. The isolator includes a welded metal bellows which both forms a vacuum-tight passage and acts as an isolating spring, and a plurality of elastomeric isolators which clamp the oscil

A vibration isolator is disclosed to mount a cryopump expander module or other vibrating equipment on a vacuum housing. The isolator includes a welded metal bellows which both forms a vacuum-tight passage and acts as an isolating spring, and a plurality of elastomeric isolators which clamp the oscillations of the bellows.

대표청구항 ▼

1. A vibration isolator for mounting a cryopump expander module on a vacuum chamber comprising a pair of spaced parallel flanges sized and shaped so as to be easily mated with vacuum-tight connection to the cryopump expander module and the vacuum chamber, each flange having a circular port formed

1. A vibration isolator for mounting a cryopump expander module on a vacuum chamber comprising a pair of spaced parallel flanges sized and shaped so as to be easily mated with vacuum-tight connection to the cryopump expander module and the vacuum chamber, each flange having a circular port formed extending through it; a generally cylindrical bellows assembly extending between the flanges, the open ends of the bellows assembly surrounding the ports in the respective flanges to form a vacuum-tight passage through the isolator, the bellows assembly functioning as a spring isolator and coupling between the flanges; and a plurality of high damped resilient isolators mounted between the flanges in parallel with the bellows assembly, the isolators being both semi-rigid and resilient so as both to hold the flanges apart and to damp the oscillations of the bellow assembly, the spring and damping characteristics of the bellows assembly and isolators being selected so that the resonant frequency of the combination is lower than the high frequency vibrations from the expander module. 2. A vibration isolator as claimed in claim 1 wherein the bellows assembly is formed of welded stainless steel. 3. A vibration isolator as claimed in claim 1 wherein the resilient isolators are formed of neoprene elastomer. 4. A vibration isolator as claimed in claim 1 wherein there are four symmetrically spaced resilient isolators. 5. A vibration isolator as claimed in claim 1 wherein there are four symmetrically spaced holes formed in each of the flanges so that bolts can be extended through the vibration isolator. 6. A vibration isolator as claimed in claim 1 wherein there is an inwardly extending rib formed on the inside annular surface of each flange and the end of the bellows assembly is welded to the rib.