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Method of preparing single crystalline cubic silicon carbide layers 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/205
  • H01L-029/04
출원번호 US-0643327 (1984-08-22)
발명자 / 주소
  • Addamiano, Arrigo
출원인 / 주소
  • The United States of America as represented by the Secretary of the Navy
대리인 / 주소
    Beers, Robert F.Ellis, William T.Schwartz, Ansel M.
인용정보 피인용 횟수 : 17  인용 특허 : 0

초록

A method of making very pure cubic silicon carbide, SiC, comprising the steps of: loading a first inner graphite cup of a Lely type furnace while cold with a large number of crystals of SiC that are used as substrates; sealing the first cup with a graphite lid; inserting the first cup into a second

대표청구항

1. A method of making very pure cubic silicon carbide comprising the steps of: loading a first inner graphite cup of a Lely-type furnace, while cold, with a large number of crystal forms of SiC that are used as substrates; sealing the first cup with a graphite lid; inserting the first cup into

이 특허를 인용한 특허 (17)

  1. Jaussaud Claude,FRX ; Madard Roland,FRX ; Anikin Mikhail,FRX ; Garcon Isabelle,FRX, Apparatus and process for the formation of monocrystalline silicon carbide (SiC) on a nucleus.
  2. Boecker Wolfgang D. G. (Lewiston NY) Chwastiak Stephen (East Amherst NY) Korzekwa Tadeusz M. (Lewiston NY) Lau Sai-Kwing (East Amherst NY), Hexagonal silicon carbide platelets and preforms and methods for making and using same.
  3. Boecker Wolfgang D. G. (Lewiston NY) Chwastiak Stephen (East Amherst NY) Korzekwa Tadeusz M. (Lewiston NY) Lau Sai-Kwing (East Amherst NY), Hexagonal silicon carbide platelets and preforms and methods for making and using same.
  4. Vodakov, Yury Alexandrovich; Mokhov, Evgeny Nikolaevich; Ramm, Mark Grigorievich; Roenkov, Alexandr Dmitrievich; Makarov, Yury Nikolaevich; Karpov, Sergei Yurievich; Ramm, Mark Spiridonovich; Temkin,, Low defect axially grown single crystal silicon carbide.
  5. Kalisher Murray H. (555 S. San Marcos Rd. Santa Barbara CA 93111) Herning Paul E. (1410 N. Refugio Rd. Santa Ynez CA 93460), Method and apparatus for growing films on a substrate.
  6. Vodakov, Yury Alexandrovich; Mokhov, Evgeny Nikolaevich; Ramm, Mark Grigorievich; Roenkov, Alexandr Dmitrievich; Makarov, Yury Nikolaevich; Karpov, Sergei Yurievich; Ramm, Mark Spiridonovich; Temkin,, Method for growing single crystal silicon carbide.
  7. Leonard, Robert Tyler; Powell, Adrian; Tsvetkov, Valeri F., Method of producing high quality silicon carbide crystal in a seeded growth system.
  8. Kitou Yasuo,JPX ; Sugiyama Naohiro,JPX ; Okamoto Atsuto,JPX ; Tani Toshihiko,JPX ; Kamiya Nobuo,JPX, Method of producing single crystals and a seed crystal used in the method.
  9. Kito Yasuo,JPX ; Kotanshi Youichi,JPX ; Onda Shoichi,JPX ; Hanazawa Tatuyuki,JPX ; Kitaoka Eiji,JPX, Method of producing single-crystal silicon carbide.
  10. Vodakov, Yury Alexandrovich; Mokhov, Evgeny Nikolaevich; Ramm, Mark Grigorievich; Roenkov, Alexandr Dmitrievich; Makarov, Yury Nikolaevich; Karpov, Sergei Yurievich; Ramm, Mark Spiridonovich; Temkin,, Niobium crucible fabrication and treatment.
  11. Leonard, Robert Tyler; Powell, Adrian; Tsvetkov, Valeri F., Producing high quality bulk silicon carbide single crystal by managing thermal stresses at a seed interface.
  12. Seki, Akinori; Fujiwara, Yasuyuki, Production method of n-type SiC single crystal, n-type SiC single crystal obtained thereby and application of same.
  13. Takahashi Jun,JPX ; Kanaya Masatoshi,JPX ; Fujiwara Yuichiro,JPX ; Ohtani Noboru,JPX, SiC single crystal and method for growth thereof.
  14. Davis Robert F. (Raleigh NC) Carter ; Jr. Calvin H. (Raleigh NC) Hunter Charles E. (Durham NC), Sublimation of silicon carbide to produce large, device quality single crystals of silicon carbide.
  15. Helava,Heikki I.; Ramm,Mark G., Tantalum based crucible.
  16. Vodakov, Yury Alexandrovich; Mokhov, Evgeny Nikolaevich; Ramm, Mark Grigorievich; Roenkov, Alexandr Dmitrievich; Makarov, Yury Nikolaevich; Karpov, Sergei Yurievich; Ramm, Mark Spiridonovich; Temkin,, Tantalum crucible fabrication and treatment.
  17. Vodakov Yury Alexandrovich,RUX ; Mokhov Evgeny Nikolaevich,RUX ; Ramm Mark Grigorievich,RUX ; Roenkov Alexandr Dmitrievich,RUX ; Makarov Yury Nikolaevich,RUX ; Karpov Sergei Yurievich,RUX ; Ramm Mark, Technique for growing silicon carbide monocrystals.
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