초록 ▼

An automatic sputtering apparatus for coating semiconductor wafers uses shuttle wafer carriers and elevators to handle wafers within the apparatus. The wafer carrier has a hole in the center. One side of the wafer carrier is opened, thereby forming a throat in the shuttle wafer carrier in the form o

An automatic sputtering apparatus for coating semiconductor wafers uses shuttle wafer carriers and elevators to handle wafers within the apparatus. The wafer carrier has a hole in the center. One side of the wafer carrier is opened, thereby forming a throat in the shuttle wafer carrier in the form of the letter C. The elevator has a cantilevered shaft. The upper part of the shaft of the elevator is centered under the wafer while the lowest part of the cantilevered shaft is under a point outside the wafer carrier. The connecting portion of the shaft passes through the throat of the wafer carrier as the wafer is lifted. Since the lifting portion of the shaft is outside the wafer carrier, the shuttle can move with the elevator in the up position. The pedestal for holding the wafer on the elevator is equipped with arms which project upward at an angle to the horizontal, thereby confining the wafer to a pedestal.

대표청구항 ▼

1. A workpiece handling apparatus, comprising: an elevator pedestal having top and bottom; an elongated first vertical support member having top and bottom ends, said elevator pedestal being attached to said top end of said first vertical support member at said bottom of said elevator pedestal;

1. A workpiece handling apparatus, comprising: an elevator pedestal having top and bottom; an elongated first vertical support member having top and bottom ends, said elevator pedestal being attached to said top end of said first vertical support member at said bottom of said elevator pedestal; an offsetting support member having first and second ends, said elongated vertical support member being attached to said first end of said offsetting support member at said bottom end of said first vertical support member; an elongated second vertical support member having top and bottom ends, said offsetting support member being attached to said top end of said second vertical support member at said second end of said offsetting support member, whereby said first and second vertical support members are generally parallel but offset from each other; means for actuating attached to said bottom end of said lifting support member; a shuttle wafer carrier having central opening and throat open to one side, with said carrier oriented so that said offsetting support member can pass through said throat as the workpiece is raised; and means for moving said shuttle wafer carrier. 2. A workpiece handling apparatus as in claim 1 where said shuttle wafer carrier has recesses which confine the wafer horizontally. 3. A workpiece handling apparatus as in claim 1 including at least three projecting arms approximately equally spaced and attached to said pedestal, said projecting arms being approximately equally spaced and attached at an angle to the horizontal so as to horizontally confine the workpiece, and where said shuttle wafer carrier has inlets for the passage of said projecting arms through said shuttle. 4. A workpiece handling apparatus, comprising: an elevator pedestal; an elongated lifting support member; means for offsetting said pedestal from said lifting support member; means for actuating said support member; a shuttle wafer carrier having central opening and throat open to one side, with said carrier oriented so that said means for offsetting said pedestal can pass through said throat as the workpiece is raised; and means for moving said shuttle wafer carrier. 5. A workpiece handling apparatus, comprising: a cantilevered lifting support member having top and bottom ends; means for actuating said support member; at least three projecting arms attached to said top of said support member, said projecting arms being approximately equally spaced and attached at an angle to the horizontal so as to horizontally confine the workpiece; a shuttle wafer carrier having central opening and throat open to one side, with said carrier oriented so that said projecting arms can pass through said opening and said cantilevered lifting support member can pass through said throat as the workpiece is raised; and means for moving said shuttle wafer carrier. 6. A workpiece handling apparatus as in claim 4 including at least three projecting arms attached to said pedestal, said projecting arms being approximately equally spaced and attached at an angle to the horizontal so as to horizontally confine the workpiece. 7. A workpiece handling apparatus as in claim 6 wherein said central opening in said shuttle wafer carrier has inlets in said opening for the passage of said projecting arms through said shuttle as the workpiece is raised. 8. A workpiece handling apparatus as in claim 4 including at least three projecting arms attached to said shuttle wafer carrier, said projecting arms being approximately equally spaced and attached horizontally so as to support the workpiece. 9. A workpiece handling apparatus as in claim 6 wherein said pedestal has inlets on its periphery for the passage of said projecting arms as the workpiece is raised. 10. A workpiece handling apparatus as in claims 1, 3, 4, 5 or 7 where said shuttle wafer carrier has recesses which confine the workpiece horizontally. 11. Workpiece handling apparatus, comprising: a carrier including an opening therethrough and having workpiece carrying means adjacent said opening and adapted to releasably carry a workpiece in alignment with said opening, said opening including a side portion extending to and through an edge of said carrier; a support structure with support means connected to said support structure and adapted to releasably support a workpiece adjacent an end portion of the support structure; means for reciprocating said support structure such that said support means on the support structure moves along a first path of travel; said carrier being adapted for movement along a second path of travel transverse to said first path of travel to move said carrier between spaced positions, including one position in which said support means on said support structure is aligned with said opening in the carrier; said support means on the support structure being dimensioned to fit through said opening, whereby when support means is moved along said first path of travel, said support means will pass through said opening when the carrier is stationed in said one position; said support structure having an offset portion spaced outwardly from said first path of travel, said offset portion being configured such that when said support means on the support structure is moved through said aperture to move a workpiece from said carrier to a position spaced from the carrier, said offset portion is spaced outwardly of said edge of the carrier; whereby when a workpiece is thus positioned on said support means, said carrier is free to move away from said one position without contacting said support structure.