초록 ▼

A transducer has a first and second sensing diaphragm configured such that a first pressure P1 is applied to the first diaphragm and a second pressure P2 is applied to the second diaphragm and wherein both diaphragms are formed on the same substantially flat face of a diaphragm wafer. The transducer

A transducer has a first and second sensing diaphragm configured such that a first pressure P1 is applied to the first diaphragm and a second pressure P2 is applied to the second diaphragm and wherein both diaphragms are formed on the same substantially flat face of a diaphragm wafer. The transducer is configured such that each diaphragm responsive to P1 or P2 respectively also affects a fluid in a closed common fluid cavity such that the deflection of the diaphragm is representative of the pressure differential (P1-P2).

대표청구항 ▼

A transducer having a first sensing diaphragm and a second sensing diaphram each configured such that a first pressure (Pl) is applied to the first diaphragm and a second pressure (P2) is applied to the second diaphragm, and wherein both diaphragms are formed on a diaphragm wafer and means defining

A transducer having a first sensing diaphragm and a second sensing diaphram each configured such that a first pressure (Pl) is applied to the first diaphragm and a second pressure (P2) is applied to the second diaphragm, and wherein both diaphragms are formed on a diaphragm wafer and means defining an enclosed common fluid cavity fluidly open to each diaphragm responsive to such pressure, said cavity being filled with a substantially non-compressible fluid such that deflection of the diaphragms is representative of the pressure differential (P1-P2), the first and second diaphragms being formed on the one substantially flat face of the diaphragm wafer.