초록 ▼

An inert gas stream containing parts per million levels of impurities such as O2, CO, CO2, H2, H2O, is purified by passing the same sequentially through a first bed and second bed of material. In the first bed, carbon monoxide and hydrogen are both reacted with oxygen to form CO2 and H2O. The latter

An inert gas stream containing parts per million levels of impurities such as O2, CO, CO2, H2, H2O, is purified by passing the same sequentially through a first bed and second bed of material. In the first bed, carbon monoxide and hydrogen are both reacted with oxygen to form CO2 and H2O. The latter is retained in this first bed while the reaction products and the inert gas stream are supplied to a second of material which is comprised of a getter. In this bed, oxygen reacts with the getter material and carbon dioxide is adsorbed therein so that the inert gas stream leaving the second bed is substantially free of such impurities. The first and second beds of material operate at temperatures up to about 38°and these materials may be regenerated by heating the same to approximately 200°C. and purging such beds with a purge gas flow.

대표청구항 ▼

A method of purifying an inert gas stream containing up to about 10 parts per million of an impurity selected from the group of CO, O2, H2, H2O and CO2 and mixtures thereof, comprising the steps of: passing said inert gas stream through a first bed of a catalytic material at a temperature of up to a

A method of purifying an inert gas stream containing up to about 10 parts per million of an impurity selected from the group of CO, O2, H2, H2O and CO2 and mixtures thereof, comprising the steps of: passing said inert gas stream through a first bed of a catalytic material at a temperature of up to about 38°C., said catalytic material capable of effecting the reaction of CO and O2 to form CO2 and H2 and O2 to form H2O; passing said inert gas stream from said first bed of catalytic material through a second bed of a getter material at a temperature of up to about 30°C., said getter material capable of reacting with unreacted O2 and adsorbing CO2 therein; retaining said H2O in said beds of material; and discharging from said second bed of getter material a thus purified inert gas stream containing less than about 1 part per million of said impurity.