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Methods of and apparatus for vapor delivery control in optical preform manufacture 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F27D-023/00
  • F27B-017/00
  • F22B-001/28
  • B01D-047/02
출원번호 US-0637246 (1984-08-02)
발명자 / 주소
  • Lynch Brian (Norcross GA) Narasimham Pundi L. (Norcross GA) Partus Fred P. (Marietta GA)
출원인 / 주소
  • AT&T Technologies, Inc. (Berkeley Heights NJ 02)
인용정보 피인용 횟수 : 37  인용 특허 : 5

초록

A vapor delivery system for the manufacture of an optical preform includes a deposition bubbler (60) and another bubbler (40) referred to as a supply bubbler which is interposed between a reservoir (24) of a liquid and the deposition bubbler. Heat energy is applied to the supply bubbler and to the d

대표청구항

A method of controlling the delivery of vapor of a liquid to a vapor deposition site, said method including the steps of: providing a deposition bubbler which contains a quantity of the liquid and which is in fluid communication with the deposition site; providing a supply bubbler which contains a q

이 특허에 인용된 특허 (5)

  1. MacChesney John B. (Stirling NJ) O\Connor Paul B. (Plainfield NJ), Optical fiber fabrication and resulting product.
  2. Schumacher John C. (Oceanside CA), Process and apparatus for bubbling gas through a high purity liquid.
  3. Turner Jesse R. (Glenwood AR Allene A. Turner executrix), Superheated steam generator.
  4. Partus Fred P. (Cobbs County GA), Vapor delivery control system and method.
  5. Partus Fred P. (Cobb County GA), Vapor delivery system and method of maintaining a constant level of liquid therein.

이 특허를 인용한 특허 (37)

  1. Scholz,Christoph, Apparatus and process for refilling a bubbler.
  2. Tsumura, Hiroshi; Koide, Hiroyuki; Tobisaka, Yuuji; Hatayama, Kazuhisa; Ogino, Go; Shimada, Tadakatsu; Hirasawa, Hideo, Apparatus for manufacturing glass base material and a method for manufacturing glass base material.
  3. Sielaff Gnter (Bensheim DEX) Joseph Frank (Gernsheim DEX) Harder Norbert (Aschaffenburg DEX), Apparatus for producing a gas mixture by the saturation method.
  4. Graibus, Richard B; Turner, Jimmy L; McCullough, Charles T; Williams, Dennis K; Sulitis, Edward L, Automated super heated steam generators.
  5. Easton, Mark C, Automatic venting of refillable bulk liquid canisters.
  6. Fair David L. (Rockford IL), Bubbler container automatic refill system.
  7. Fair David L. (Rockford IL), Bubbler container automatic refill system.
  8. Lipisko Bruce A. (Carlsbad CA) Schumacher John C. (Rancho Santa Fe CA) Howard Richard E. (Escondido CA) Randtke Peter T. (San Marcos CA) Sandu Adrian (La Mesa CA) Fletcher Robert E. (Vista CA) Graf H, Chemical refill system.
  9. Woelk, Egbert; DiCarlo, Ronald L.; Shenai-Khatkhate, Deodatta Vinayak, Delivery device, methods of manufacture thereof and articles comprising the same.
  10. Takeshita, Kazuhiro; Nagashima, Shinji; Mizutani, Yoji; Katayama, Kyoshige, Gas treatment apparatus.
  11. Terasaka, Masanori, Heating vaporization system and heating vaporization method.
  12. Rauleder, Hartwig; Mueh, Ekkehard; Nicolai, Rainer; Klein, Harald; Schork, Reinhold, Large container for handling and transporting high-purity and ultra high purity chemicals.
  13. Curran,William J., Liquid vapor delivery system and method of maintaining a constant level of fluid therein.
  14. Wen Cheng P. (Mission Viejo CA) Rolph Randy K. (Palos Verdes Estates CA) Zielinski Timothy T. (Torrance CA), MOCVD reactor system for indium antimonide epitaxial material.
  15. Ravetz, Megan; Williams, Graham; Nelson, Andrew; Blunt, Roy Trevor; Williams, Howard; Odedra, Rajesh, Method and apparatus for delivering precursors to a plurality of epitaxial reactor sites.
  16. Nguyen Son T. ; Hendrickson Scott, Method and apparatus for generating controlled mixture of organic vapor and inert gas.
  17. Oguro Kyoji (Gunma-ken JPX) Kurosawa Yasushi (Gunma-ken JPX), Method and apparatus for supply of liquid raw material gas.
  18. Lee,Jai Dong; Hwang,Ki Hyun; Ko,Chang Hyun, Method and apparatus for supplying a source gas.
  19. Graibus, Richard B; Turner, Jimmy L; McCullough, Charles T; Williams, Dennis K, Method and apparatus for the downhole injection of superheated steam.
  20. Woelk, Egbert; DiCarlo, Jr., Ronald L., Method for constant concentration evaporation and a device using the same.
  21. Curran,William J., Method for maintaining a constant level of fluid in a liquid vapor delivery system.
  22. Koller, Andreas; Behres, Alexander, Method for supplying a process with an enriched carrier gas.
  23. Graibus, Richard B; Turner, Jimmy L; McCullough, Charles T; Williams, Dennis K; Sulitis, Edward L, Methods for super heated steam generation.
  24. Partus Fred Paul, Methods of and systems for vapor delivery control in optical preform manufacture.
  25. Moriyama, Masashi; Yamahira, Yutaka; Matsuyama, Yuji, Processing liquid supply unit.
  26. Kang, Gu-Young, Raw material providing device for chemical vapor deposition process.
  27. Rodgers Donald B., Self-metering reservoir.
  28. Rodgers Donald B., Self-metering reservoir.
  29. Rodgers Donald B., Self-metering reservoir.
  30. Rodgers Donald B., Self-metering reservoir.
  31. Hong, Jong-Won; Jeong, Min-Jae; Na, Heung-Yeol; Kang, Eu-Gene; Chang, Seok-Rak, Source gas supply unit, and deposition apparatus and method using the same.
  32. Graibus, Richard B; Turner, Jimmy L; McCullough, Charles T; Williams, Dennis K; Sulitis, Edward L, Superheated steam generators.
  33. Aichinger, Heinrich; Fried, Michael; Nestler, Gerhard; Odenwald, Oliver, Supply system for transferring a fluid to a container.
  34. Tomasel, Fernando Gustavo; Mauck, Justin; Gonzalez, Juan Jose, System and method for delivering vapor.
  35. Buchanan, Daryl; Tariq, Faisal; Mei, Hai; Tison, Stuart, System and method for producing and delivering vapor.
  36. Rodgers, Donald B., System, apparatus and method for measuring and transferring the contents of a vessel.
  37. Harp, Maureen; Meyer, William; Deutsch, David, Systems, methods, apparatuses, and computer program products for providing interim volume verification of a fluid.
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