초록 ▼

A transfer apparatus for conveying a semiconductor wafer between a first location and a second location comprises transfer arm means including first and second elongated arm members each having first and second ends. The first end of the first arm member is pivotally supported at a point generally m

A transfer apparatus for conveying a semiconductor wafer between a first location and a second location comprises transfer arm means including first and second elongated arm members each having first and second ends. The first end of the first arm member is pivotally supported at a point generally midway between the two locations and the first end of the second arm member is pivotally supported by the first arm member proximate to the second end thereof. The first and second arm members are of sufficient length and are cooperative to pivot to at least a first position in which at least a part of the second arm extends to the first location, a second position in which at least a part of the second arm member extends to the second location and an intermediate position. Arm member actuator means are provided for pivoting the first and second arm members to the first, second and intermediate positions.

대표청구항 ▼

A transfer apparatus for conveying a semiconductor wafer between a first location at a first pressure and a second location at a second pressure without substantially affecting the pressure at either location comprising: a substantially airtight transfer chamber disposed between the first and second

A transfer apparatus for conveying a semiconductor wafer between a first location at a first pressure and a second location at a second pressure without substantially affecting the pressure at either location comprising: a substantially airtight transfer chamber disposed between the first and second locations, the transfer chamber including a first closeable port for providing communication between the first location and the transfer chamber, a second closeable port for providing communication between the second location and the transfer chamber and port actuator means for opening and closing the first and second ports, the transfer chamber further including means for the treatment of the semiconductor wafer; transfer means for transferring the wafer between locations including first and second elongated arm members each having first and second ends, the first end of the first arm member being pivotally supported with the transfer chamber and the first end of the second arm member being pivotally supported by the first arm member proximate to the second end of the first arm member, the second end of the second arm member being adapted to receive and support a semiconductor wafer, the first and second arm members being of sufficient length and being cooperative to pivot to at least three positions, the three positions including a first position in which at least a portion of the second end of the second arm member extends through the first port, a second position in which at least a portion of the second end of the second arm member extends through the second port and an intermediate position in which both arm members are located within the transfer chamber, whereby a semiconductor wafer may be placed upon the second end of the second arm member when the arm members are in one of the first or second positions, may be treated by the treatment means when the arm members are in the intermediate position and may be removed when the arm members are in the other of the first and second positions; arm member actuator means for pivoting the first and second arm members to the first, second and intermediate positions; pressure adjusting means for adjusting the pressure within the transfer chamber to either the first or the second pressure; and control means for controlling the port actuator means, the arm member actuator means and the pressure adjusting means, whereby the pressure within the transfer chamber is adjusted only when both ports are closed with the arm members in the intermediate position, whereby the first port is opened to permit the arm members to pivot to the first position only when the pressure within the transfer chamber has been adjusted to the first pressure, and, whereby the second port is opened to permit the arm members to pivot to the second position only when the pressure within the transfer chamber has been adjusted to the second pressure.