초록 ▼

Compact and versatile apparatus for deposition of multi-layer coatings on substrates at reduced pressure comprises at least 3 and preferably at least 4 evacuable deposition chambers, means for evacuating each of said deposition chambers and coating means in each of said deposition chambers for depos

Compact and versatile apparatus for deposition of multi-layer coatings on substrates at reduced pressure comprises at least 3 and preferably at least 4 evacuable deposition chambers, means for evacuating each of said deposition chambers and coating means in each of said deposition chambers for depositing a coating layer on a substrate; an evacuable transfer chamber with closable ports between said transfer chamber and each of said coating chambers for transfer of a substrate to be coated between said deposition chambers; means for evacuating said transfer chamber; and transfer means for transferring a substrate between said deposition chambers via the transfer chamber. The apparatus is especially useful for the production of photovoltaic cells in which the active layers are formed of amorphous silicon deposited from a glow discharge.

대표청구항 ▼

An apparatus for deposition of multi-layer coatings on substrates comprising an evacuable transfer chamber, at least 3 evacuable deposition chambers disposed around the transfer chamber and extending radially away from an axis with the transfer chamber, means for evacuating each of said deposition c

An apparatus for deposition of multi-layer coatings on substrates comprising an evacuable transfer chamber, at least 3 evacuable deposition chambers disposed around the transfer chamber and extending radially away from an axis with the transfer chamber, means for evacuating each of said deposition chambers, and coating means in each of said deposition chambers for depositing a coating layer on a substrate, said evacuable transfer chamber having closable ports providing communication between said transfer chamber and each of said deposition chambers for transfer of a substrate to be coated between said deposition chambers, means for evacuating said transfer chamber, and transfer means rotatably mounted in said transfer chamber for rotation about said axis in the transfer chamber for transferring a substrate between said deposition chambers via the transfer chamber.