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A paired electrode for use in a plasma chamber. In one embodiment, the paired electrode comprises a plurality of angle members which are disposed parallel to one another. Pairs of the angle members are positioned facing one another, one functioning as a power electrode member and the other as a grou

A paired electrode for use in a plasma chamber. In one embodiment, the paired electrode comprises a plurality of angle members which are disposed parallel to one another. Pairs of the angle members are positioned facing one another, one functioning as a power electrode member and the other as a ground electrode member. All of the power electrode members are rigidly fastened to one another by means of a transverse power bus and all of the ground electrode members are rigidly fastened to one another by means of a transverse ground bus. The power bus and the ground bus are electrically connected to a power source, usually a RF power source and a ground of the plasma chamber, respectively. The plasma chamber contains a plurality of paired electrodes, and objects to be processed by plasma are placed between the paired electrodes.

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An electrode pair for plasma chambers, comprising in combination: a plurality of power electrode members; a plurality of ground electrode members; each said electrode members comprising an angle cross-sectional configuration having a wider side portion and a narrower side portion connected along the

An electrode pair for plasma chambers, comprising in combination: a plurality of power electrode members; a plurality of ground electrode members; each said electrode members comprising an angle cross-sectional configuration having a wider side portion and a narrower side portion connected along their length in a substantially right angle relationship; means for positioning said power electrode members in facing relationship with said ground electrode members with said wider side portions of said power electrode members forming one surface of the electrode pair and the wider portions of the ground electrode members forming the other surface of the electrode pair such that an edge of the respective said wider side portions of adjacent said electrode members overlap one another, said positioning means comprising a plurality of electrically insulative stand-offs fastened to said overlapping edges of the respective said wider side portions of said electrode members; means for supplying electrical energy to each of said power electrode members; and means for connecting each said ground electrode member to the ground of the plasma chamber.