초록 ▼

A directional accelerometer and a process for the microlithographic fabrication of such an accelerometer. The accelerometer includes a substrate having at least one recess to define at least one beam in the substrate. One of the ends of the beam is integrally formed with the remainder of the substra

A directional accelerometer and a process for the microlithographic fabrication of such an accelerometer. The accelerometer includes a substrate having at least one recess to define at least one beam in the substrate. One of the ends of the beam is integrally formed with the remainder of the substrate. The beam, which is oriented in the first direction, is deformable into the recess in a second direction only, parallel to the substrate surface and perpendicular to the first direction. The second direction corresponds to the acceleration component to be measured. Electrical connections and contacts are formed in the substrate for the device measuring the deformations of the beam. These measurements make it possible to determine the acceleration components.

대표청구항 ▼

A monodirectional accelerometer for measuring one component of an acceleration of a moving body, comprising: a substrate formed of a material and having at least one recess; at least one parallelepipedic beam placed in the recess and having a first end which is integral with said substrate, said bea

A monodirectional accelerometer for measuring one component of an acceleration of a moving body, comprising: a substrate formed of a material and having at least one recess; at least one parallelepipedic beam placed in the recess and having a first end which is integral with said substrate, said beam being formed of said material, being oriented in a first direction, having a width in a second direction and being able to deform in the second direction in said recess and having a thickness higher than its width, said thickness being oriented in a third direction perpendicular to said first and second directions so that said beam is only deformable in said second direction, said second direction being parallel to the surface of said substrate and perpendicular to said first direction, said deformation in said second direction corresponding to said component of said acceleration to be measured; means for measuring deformations of said beam in said second direction to determine the value of said component of said acceleration; and electrical contacts formed on said substrate for connecting said means for measuring with said beam.