초록 ▼

A displacement device, particularly useful in an apparatus for the photolithographic treatment of a substrate, is provided with a holder placed on a carriage mechanism being acted upon by driving members for imparting translational and rotary movements to the holder. The carriage is constituted by a

A displacement device, particularly useful in an apparatus for the photolithographic treatment of a substrate, is provided with a holder placed on a carriage mechanism being acted upon by driving members for imparting translational and rotary movements to the holder. The carriage is constituted by a lower carriage part and an upper carriage part, each of which has a flat surface facing each other. Three linear driving members, each having a housing and a driving element projecting from both ends of the housing, and axially moving with respect to the housing, act upon the carriage. The housing of the first driving member is connected to an upper carriage part, while the driving elements of the second and third driving members are coupled to the lower carriage part with the second and third driving members respectively being connected to the first driving member in an arrangement in the shape of an H.

대표청구항 ▼

A displacement device for use in an apparatus for photolithographic treatment of a substrate, said device comprising a lower support part and an upper carriage part, said parts having flat surfaces facing each other, a first linear driving member having a first housing and first driving element mean

A displacement device for use in an apparatus for photolithographic treatment of a substrate, said device comprising a lower support part and an upper carriage part, said parts having flat surfaces facing each other, a first linear driving member having a first housing and first driving element means with two ends, said upper carriage part being supported on said first housing, said first housing being movable with respect to said first driving element means and with respect to said lower support part in one axis, thereby rendering said upper carriage part movable with respect to said lower support part along said axis, a second linear driving member having a second housing and second driving element means, a third linear driving member having a third housing and third driving element means, said second and third housings being movable with respect to said second and third driving element means respectively and with respect to said lower support part in an axis perpendicular to said one axis, said second and third housings being movable parallel to each other, and connecting means connecting said ends of said first driving element means to said second and third housings and rendering said first housing and said upper carriage movable along said perpendicular axis and rotatable with respect to said lower support part.