초록 ▼

A semiconductor substrate transport system includes a semiconductor substrate holder for holding semiconductor substrates to be transported, a linear pulse motor for driving and reciprocating the semiconductor substrate holder, a pulse oscillator connected to the linear pulse motor, an arrangement f

A semiconductor substrate transport system includes a semiconductor substrate holder for holding semiconductor substrates to be transported, a linear pulse motor for driving and reciprocating the semiconductor substrate holder, a pulse oscillator connected to the linear pulse motor, an arrangement for holding a clearance of the linear pulse motor, and guide for guiding the reciprocating motion of the linear pulse motor. The semiconductor substrate holder, the linear pulse motor, the clearance holding arrangement and the guide are installed in a chamber which is brought into a vacuum atmosphere, whereby the appearance of dust during the transport of the semiconductor substrates can be suppressed, and the available percentage and throughput of the semiconductor substrates processed or to be processed by a semiconductor production apparatus can be enhanced.

대표청구항 ▼

A semiconductor substrate transport system comprising: semiconductor substrate holding means for holding semiconductor substrates to be transported; a linear pulse motor for reciprocatingly driving said semiconductor substrate holder means, said linear pulse motor including a permanent magnet, elect

A semiconductor substrate transport system comprising: semiconductor substrate holding means for holding semiconductor substrates to be transported; a linear pulse motor for reciprocatingly driving said semiconductor substrate holder means, said linear pulse motor including a permanent magnet, electromagnets, and a scale having a surface corresponding to said electromagnets, said scale being formed with comb teeth spaced at regular intervals; a pulse oscillator means for impressing pulses on said electromagnets a required transporting momentum for said semiconductor substrate holder means; clearance holding means for holding a clearance between the electromagnets and the scale; and guide means for guiding the reciprocating motion of said semiconductor substrate holding means by said linear pulse motor to transport through vacuum opening and closing means semiconductor substrates retained by said semiconductor substrate holder means between a table provided in a processing chamber adapted to be evacuated so as to create a vacuum atmosphere and a cassette in a preliminary chamber communicable with said processing chamber through said vacuum opening and closing means.