초록 ▼

A pre-assembled, self-contained clean room module having everything necessary for maintaining the cleanliness, temperature, humidity and pressurization required for the work space within the room. Because the module is factory built rather than built on site, precise quality control can be achieved

A pre-assembled, self-contained clean room module having everything necessary for maintaining the cleanliness, temperature, humidity and pressurization required for the work space within the room. Because the module is factory built rather than built on site, precise quality control can be achieved and each module can be thoroughly tested before shipment. The module is provided with its own sealed base unit which permits it to be moved or relocated without having to be disassembled, and also insures that the module will have a completely sealed sump area beneath its floor. The module is also provided with its own self-contained air conditioning unit which has two independent air systems or paths whereby only a portion of the recirculating air need be conditioned.

대표청구항 ▼

A clean room module comprising in combination a self-contained, unitary base unit including a floor, the base unit having a bottom and side walls that together define a sealed sump chamber beneath the floor; vertical side walls mounted on and supported by the base unit; an upstanding, self-contained

A clean room module comprising in combination a self-contained, unitary base unit including a floor, the base unit having a bottom and side walls that together define a sealed sump chamber beneath the floor; vertical side walls mounted on and supported by the base unit; an upstanding, self-contained air conditioning unit connected to the base unit adjacent one side wall of the clean room module; a ceiling unit in engagement with the upper edges of the side walls; means for supporting the ceiling unit independently of the side walls, the ceiling unit having filter material therein and a plenum chamber above the filter material; the floor, side walls and ceiling unit defining an enclosed clean room area; the ceiling unit plenum chamber and the base unit sump chamber being in communication with the air conditioning unit; said air conditioning unit having a first circulating path for moving the air from said base unit sump chamber to said ceiling unit plenum chamber, and a second circulating path including an automatically controllable diverter for diverting a part of the air of said base sump unit chamber from the first path, a blower having an intake coupled to said diverter, a make-up air inlet coupled to the intake of the blower and including a controllable make-up damper, air conditioning means following said blower for treating the diverted air and make-up air, and distribution means following said air conditioning means for injecting the treated air into said first circulating path, said second path handling a constant volume per unit time of flow formed of the sum of the diverted and make-up air flows, and static pressure control sensor means for controlling said make-up damper in accordance with the static pressure in said enclosed clean room area so that the air conditioning unit circulates filtered air at a constant predetermined pressure in a downward laminar flow through the enclosed clean room area.