초록 ▼

The present invention is an apparatus for maintaining articles, such as semiconductor wafers clean. The wafers or other articles to be processed are placed in a box having first and second regions for making first and second seals. A box door seals the articles into the box. The box has a second reg

The present invention is an apparatus for maintaining articles, such as semiconductor wafers clean. The wafers or other articles to be processed are placed in a box having first and second regions for making first and second seals. A box door seals the articles into the box. The box has a second region for making the second seal and has a third region for making a third seal. The box is used to transport the wafers to a port in the canopy of the processing equipment. The port is adapted for receiving the box and box door and for transferring the box door and the contents of the box into a region beneath the canopy. The canopy has a first region for making the first seal with the box. Also, the canopy has a fourth region surrounding the port for making a fourth seal. A port door is provided for closing the canopy port when no box is present. The port door has a second region for making the second seal with the box and has a fourth region for making the fourth seal with the canopy. A box door latch is provided for latching the box door to the box whereby the second seal is made and released in the second region between the box door and the box by operation of the box door latch. A box latch is provided for latching the box to the canopy whereby the first seal is made or released in the first region between the box and the canopy by the operation of the box latch.

대표청구항 ▼

An apparatus for maintaining articles to be processed in substantially particle free environment comprising, a box for containing said articles, said box having first and second regions for making first and second seals, a box door having a second region for making said second seal and having a thir

An apparatus for maintaining articles to be processed in substantially particle free environment comprising, a box for containing said articles, said box having first and second regions for making first and second seals, a box door having a second region for making said second seal and having a third region for making a third seal, port means adapted for receiving said box and box door and including further means for transferring the box door and said articles into a clean region, said port means having a first region for making said first seal and having a fourth region for making a fourth seal, a port door having a second region for making said second seal and having a fourth region for making a said fourth seal, box door latch means for latching said box door to said box whereby said second seal is made and released in the second region between said box and said box door by operation of said box door latch means; and the port door including means for activating said box door latch means; wherein said first and second regions are displaced in space; wherein said latch means operates in the space between said first and second regions; wherein said box has a box opening defined by said second region; and wherein said box door functions to close said opening by making said second seal in said second region, said box door having a first wall extending between said first and said third regions extending generally around the perimeter of said box opening and having a second wall connected to said first wall and supporting said second region, said first and second walls defining an internal space generally surrounded by said second region, said box door latch means further including retention means extending through said first wall into said box for holding said box door stationary with respect to said box thereby closing said box opening.