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특허 상세정보

Method and apparatus for feeding drug liquid from hermetic returnable can

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B67D-005/00   
미국특허분류(USC) 222/56 ; 222/61 ; 222/66 ; 222/399
출원번호 US-0660412 (1984-10-12)
우선권정보 JP-0192514 (1983-10-17); JP-0192515 (1983-10-17)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 45  인용 특허 : 3
초록

An apparatus for feeding a variety of doping liquid used in doping-liquid treatment processes for electronic materials such as semiconductors and precision machinery components, and a feeding monitor apparatus. More specifically, it relates to an apparatus for stably feeding the doping liquid while detecting its volume, in the case where the doping liquid is fed from a liquid-filled hermetic returnable can to the doping liquid treatment process, and a feeding monitor apparatus is connected between the returnable can and treatment process.

대표
청구항

An apparatus for feeding a doping liquid from a hermetic reusable canister to a monitor tank from which the liquid is fed into a manufacturing device, comprising: a gas supply source; a reusable canister with a top, sides, and bottom; a monitor tank having a bottom, sides, and a top with an opening including a neck; and a lid capable of being mounted to said monitor tank at the opening of said monitor tank such that a seal is provided between said lid and the neck of said opening, said lid further comprising: a liquid supply member to provide for fluid c...

이 특허를 인용한 특허 피인용횟수: 45

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