|국가/구분||United States(US) Patent 등록|
|미국특허분류(USC)||222/56 ; 222/61 ; 222/66 ; 222/399|
|우선권정보||JP-0192514 (1983-10-17); JP-0192515 (1983-10-17)|
|발명자 / 주소|
|출원인 / 주소|
|인용정보||피인용 횟수 : 45 인용 특허 : 3|
An apparatus for feeding a variety of doping liquid used in doping-liquid treatment processes for electronic materials such as semiconductors and precision machinery components, and a feeding monitor apparatus. More specifically, it relates to an apparatus for stably feeding the doping liquid while detecting its volume, in the case where the doping liquid is fed from a liquid-filled hermetic returnable can to the doping liquid treatment process, and a feeding monitor apparatus is connected between the returnable can and treatment process.
An apparatus for feeding a doping liquid from a hermetic reusable canister to a monitor tank from which the liquid is fed into a manufacturing device, comprising: a gas supply source; a reusable canister with a top, sides, and bottom; a monitor tank having a bottom, sides, and a top with an opening including a neck; and a lid capable of being mounted to said monitor tank at the opening of said monitor tank such that a seal is provided between said lid and the neck of said opening, said lid further comprising: a liquid supply member to provide for fluid c...