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High speed testing of electronic circuits by electro-optic sampling 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01J-004/00
출원번호 US-0648456 (1984-09-07)
발명자 / 주소
  • Bloom David M. (Menlo Park CA) Kolner Brian H. (Menlo Park CA)
출원인 / 주소
  • Stanford University (Stanford CA 02)
인용정보 피인용 횟수 : 53  인용 특허 : 3

초록 ▼

Non-contact measurement of signals up to and beyond 100 GHz is provided by electro-optical sampling the field in a transmission line. A first laser signal is employed to optically generate signals in a III-V compound semiconductor such as gallium arsenide. The signal is transmitted to microstrip on

대표청구항 ▼

A method of testing an electronic circuit including a transmission line on a substrate of semiconductor material exhibiting linear electro-optic effect comprising the steps of generating an electrical signal, transmitting said electrical signal to said transmission line, applying a circularly polari

이 특허에 인용된 특허 (3)

  1. Valdmanis Janis A. (Columbus IN) Mourou Gerard (Rochester NY), Measurement of electrical signals with picosecond resolution.
    상세보기
  2. Mourou Gerard (Rochester NY) Meyer Kevin E. (Rochester NY), Measurement of electrical signals with subpicosecond resolution.
    상세보기
  3. Harney Robert C. (Livermore CA), Method and apparatus for pulse stacking.
    상세보기

이 특허를 인용한 특허 (53)

  1. Bruce Victoria J. ; Dabney Gregory A., Analyzing an electronic circuit formed upon a frontside surface of a semiconductor substrate by detecting radiation exiting a backside surface coated with an antireflective material.
    상세보기
  2. Pakdaman, Nader; Kasapi, Steven; Goldberger, Itzik, Apparatus and method for dynamic diagnostic testing of integrated circuits.
    상세보기
  3. Kasapi, Steven, Apparatus and method for measuring characteristics of dynamic electrical signals in integrated circuits.
    상세보기
  4. Kasapi,Steven, Apparatus and method for measuring characteristics of dynamic electrical signals in integrated circuits.
    상세보기
  5. Lo, William; Wilsher, Kenneth; Nataraj, Nagamani; Boiadjieva, Nina, Apparatus and method for probing integrated circuits using polarization difference probing.
    상세보기
  6. Swapp Mavin C. (Mesa AZ), Apparatus and method for testing semiconductor devices.
    상세보기
  7. Patterson Joseph M. (Mission Viejo CA), Apparatus including a focused UV light source for non-contact measurement and alteration of electrical properties of con.
    상세보기
  8. William K. Lo, Beam delivery and imaging for optical probing of a device operating under electrical test.
    상세보기
  9. Aghababazadeh, Majid; Estabil, Jose J.; Pakdaman, Nader; Steinbrueck, Gary L., Contactless technique for evaluating a fabrication of a wafer.
    상세보기
  10. Aghababazadeh, Majid; Estabil, Jose J.; Pakdaman, Nader; Steinbrueck, Gary L., Contactless technique for evaluating a fabrication of a wafer.
    상세보기
  11. Wilsher Kenneth R. ; Rajan Suresh N. ; Lo William K., Dual-laser voltage probing of IC's.
    상세보기
  12. Valdmanis Janis A. (Westfield NJ), Electro-optic measurements of voltage waveforms on electrical conductors.
    상세보기
  13. Forsyth Keith W. (Philadelphia PA) Bado Philippe (Rush NY), Electro-optic sampling system with dedicated electro-optic crystal and removable sample carrier.
    상세보기
  14. Williamson Steven L. (Henrietta NY), Electro-optic signal measurement.
    상세보기
  15. Paul R. Prucnal, High-speed serial-to-parallel and analog-to-digital conversion.
    상세보기
  16. Pfaff, Paul L., Holographic condition assessment system for a structure including a semiconductor material.
    상세보기
  17. Holzwarth,Ronald; Mei,Michael, Interferometer, in particular for determining and stabilizing the relative phase of short pulses.
    상세보기
  18. Aghababazadeh, Majid; Estabil, Jose J.; Pakdaman, Nader; Steinbrueck, Gary L.; Vickers, James S., Intra-chip power and test signal generation for use with test structures on wafers.
    상세보기
  19. Aghababazadeh,Majid; Estabil,Jose J.; Pakdaman,Nader; Steinbrueck,Gary L.; Vickers,James S., Intra-clip power and test signal generation for use with test structures on wafers.
    상세보기
  20. Meyrueix Paul (Paris FRX) Tremblay Gerard (Loudin CA FRX) Vernhes Jean P. (San Jose CA), Method and apparatus for electro-optically testing circuits.
    상세보기
  21. Woods,Gary; Kasapi,Steven; Wilsher,Kenneth, Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system.
    상세보기
  22. Pfaff, Paul L., Method for optically testing semiconductor devices.
    상세보기
  23. Pfaff,Paul, Method for optically testing semiconductor devices.
    상세보기
  24. Pfaff, Paul; Russell, Kevin L., Method for testing a device under test including the interference of two beams.
    상세보기
  25. Itatani Taro,JPX ; Nakagawa Tadashi,JPX ; Sugiyama Yoshinobu,JPX ; Ohta Kimihiro,JPX, Method of electro-optical measurement for vector components of electric fields and an apparatus thereof.
    상세보기
  26. Pfaff, Paul L., Methods and processes for optical interferometric or holographic test in the development, evaluation, and manufacture of semiconductor and free-metal devices utilizing anisotropic and isotropic materials.
    상세보기
  27. Pfaff, Paul L., Methods for obtaining and analyzing digital interferometric data for computer testing and developing semiconductor and anisotropic devices and materials.
    상세보기
  28. Pfaff, Paul L., Methods for optically enhanced holographic interferometric testing for test and evaluation of semiconductor devices and materials.
    상세보기
  29. Pfaff, Paul L., Multiple beam transmission interferometric testing methods for the development and evaluation of subwavelength sized features within semiconductor and anisotropic devices.
    상세보기
  30. Pfaff, Paul L., Multiple optical wavelength interferometric testing methods for the development and evaluation of subwavelength sized features within semiconductor devices and materials, wafers, and monitoring all phases of development and manufacture.
    상세보기
  31. Pfaff,Paul; Mauck,Michael, Non-destructive testing system using a laser beam.
    상세보기
  32. Choi, Kwang Seong; Chung, Yong Duck; Kang, Young Shik; Jun, Dong Suk; Kim, Je Ha; Moon, Jong Tae, Optical module and optical module package.
    상세보기
  33. Pfaff, Paul L., Optical to optical methods enhancing the sensitivity and resolution of ultraviolet, electron beam and ion beam devices.
    상세보기
  34. Pfaff, Paul L., Optically enhanced holographic interferometric testing methods for the development and evaluation of semiconductor devices, materials, wafers, and for monitoring all phases of development and manufacture.
    상세보기
  35. Rauscher Christen (Alexandria VA), Photoconductive circuit element pulse generator.
    상세보기
  36. Mourou Gerard A. ; Son Joo-Hiuk ; Kim Joungho,KRX, Photoconductive element and method for measuring high frequency signals.
    상세보기
  37. Mangeney, Juliette; Crozat, Paul; Meignien, Loïc; Lourtioz, Jean-Michel, Process and device for characterising an electric signal propagating in a sample.
    상세보기
  38. Aghababazadeh,Majid; Estabil,Jose J.; Pakdaman,Nader; Steinbrueck,Gary L.; Vickers,James S., System and apparatus for using test structures inside of a chip during the fabrication of the chip.
    상세보기
  39. Kasapi, Steven, System and method for modulation mapping.
    상세보기
  40. Kasapi, Steven, System and method for modulation mapping.
    상세보기
  41. Kasapi, Steven, System and method for modulation mapping.
    상세보기
  42. Kasapi, Steven, System and method for modulation mapping.
    상세보기
  43. Kasapi, Steven, System and method for modulation mapping.
    상세보기
  44. Williamson Steven (Ann Arbor MI), System for electrical signal sampling with ultrashort optical pulses.
    상세보기
  45. Aghababazadeh, Majid; Estabil, Jose J.; Pakdaman, Nader; Steinbrueck, Gary L.; Vickers, James S., System for using test structures to evaluate a fabrication of a wafer.
    상세보기
  46. Ng, Yin Shyang; Skvortsov, Dmitry, Systems and method for laser voltage imaging state mapping.
    상세보기
  47. Ng, Yin Shyang; Skvortsov, Dmitry, Systems and method for laser voltage imaging state mapping.
    상세보기
  48. Aghababazadeh,Majid; Estabil,Jose J.; Pakdaman,Nader; Steinbrueck,Gary L.; Vickers,James S., Technique for evaluating a fabrication of a die and wafer.
    상세보기
  49. Aghababazadeh, Majid; Estabil, Jose J.; Pakdaman, Nader; Steinbrueck, Gary L.; Vickers, James S., Test structures for evaluating a fabrication of a die or a wafer.
    상세보기
  50. Cole, Bryan Edward, Test system.
    상세보기
  51. Henley Francois G. (San Jose CA) Choi Hee-June (Fremont CA) Kratzer Dean J. (Palo Alto CA) Barr Maurice R. (Saratoga CA), Ultra-high-speed digital test system using electro-optic signal sampling.
    상세보기
  52. Takahashi Hironori (c/o Hamamatsu Photonics Kabushiki Kaisha ; No. 1126-1 ; Ichino-cho Hamamatsu-shi ; Shizuoka JPX) Aoshima Shinichiro (Shizuoka JPX) Nakamura Takuya (Shizuoka JPX) Tsuchiya Yutaka (, Voltage detector using a sampling type high-speed photodetector.
    상세보기
  53. Pfaff,Paul; Russell,Kevin L., Voltage testing and measurement.
    상세보기

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