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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Conveyor system

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B65G-035/00   
미국특허분류(USC) 414/217 ; 198/950 ; 414/608 ; 414/225
출원번호 US-0672349 (1984-11-16)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 73  인용 특허 : 10
초록
▼

Apparatus for automatically transferring a cassette of semiconductor wafers from one “clean”room to a second “clean”room across an area that may be less clean. The system includes an elevator in each room where a load is manually positioned in a load stall, and is then withdrawn automatically to an elevator and moved to a different elevation and transferred to an enclosed horizontal conveyor at that elevation which spans the distance between the “clean”rooms. The load then moves on a driven cart which straddles, and is magnetically coupled to an enclosed...

대표
청구항
▼

Apparatus for transporting a cassette of semiconductor wafers, from a first clean room, having a specified maximum number of particulate contaminates for a given volume of space, to a second clean room, comprising: a first elevator station in said first clean room, said first elevator station including a housing enclosing both a chamber and a load receiving stall, both of which have a controlled environment; first mechanical transfer means for extending into said stall and withdrawing the load to an elevator position within the chamber, said transfer mea...

이 특허에 인용된 특허 (10)

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  10. Moody Brian R. (Darwen GB2) Lowe Duncan B. (Mobberley GB2) Lowe Derek W. (Southport GB2). Transport apparatus. USP1983074392435.

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