다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.NTIS 바로가기
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.DataON 바로가기
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.Edison 바로가기
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.Kafe 바로가기
|국가/구분||United States(US) Patent 등록|
|미국특허분류(USC)||414/404 ; 414/786 ; 414/416 ; 414/417|
|발명자 / 주소|
|출원인 / 주소|
|인용정보||피인용 횟수 : 11 인용 특허 : 8|
Methods and apparatus for transferring workpieces, such as silicon wafers, between a pair of cassettes involve simultaneously and conjointly indexing the cassettes such that the cassettes are incrementally lowered as the individual workpieces are removed from one cassette and delivered to the other cassette. Such indexing of the cassettes is achieved by a single elevator mechanism adapted to support both of the cassettes such that they are vertically and horizontally offset relative to each other.
Apparatus for transferring workpieces from a first cassette to a second cassette, said first and second cassettes being adapted to store workpieces one above the other, said apparatus comprising unloading means movable between a retracted position and an extended position for successively unloading workpieces from said first cassette, loading means movable between a retracted position and an extended position for successively loading said workpieces into said second cassette, means for intermediately supporting and transferring unloading workpieces betwe...