초록 ▼

The disclosed wafer handling system includes an input port, an input queue, and output port, and an output queue. The input and output queue each include a vertical elevator assembly capable of storing plural carriers representing multiple tube-loads of wafers input in the input port and into the ou

The disclosed wafer handling system includes an input port, an input queue, and output port, and an output queue. The input and output queue each include a vertical elevator assembly capable of storing plural carriers representing multiple tube-loads of wafers input in the input port and into the output queue. A ferriswheel having multiple tube-load storage means is cooperative with an input waling beam and the input queue for arraying the plural carriers therein in multiple tube-loads of wafers each at different intermediate storage locations. A vertical transfer sub-assembly is cooperative with the ferriswheel and with a computer-controlled robot arm for transferring the wafers from each tube-load of carries to quartzware maintained by an inclinable transfer pad defining an elevator-transport access port. An output walking beam is cooperative with the vertical transfer mechanism and the robot for placing processed wafers back in their original tube-load of carriers and for delivering them to the multiple tube-load output queue. The inclinable transfer pad includes movable surfaces for preventing surface contact induced product cross-contamination. Air flow patterns are so produced that positive and negative pressures cooperate to reduce air-borne contamination.

대표청구항 ▼

A wafer handling station for an automated furnace system having an elevator transport mechanism, comprising: carrier input means for receiving wafer-loaded carriers for processing; carrier output means for delivering wafer-loaded carriers after processing; quartzware receiving means for providing an

A wafer handling station for an automated furnace system having an elevator transport mechanism, comprising: carrier input means for receiving wafer-loaded carriers for processing; carrier output means for delivering wafer-loaded carriers after processing; quartzware receiving means for providing an elevator-transport access port; arraying means coupled to the input means for arraying the carriers input thereinto as an array representing a tube-load of wafers; and transfer means coupled between the carrier input means, the carrier output means, and the quartzware receiving means for transferring a tube-load of wafers to the quartzware receiving station for processing, to transfer the said wafers from the quartzware receiving station back to their particular carriers after processing, and for transferring the said wafers of a tube-load of wafers to the output means.