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A pressure sensor comprises an improved capacitive pressure transducer having a first capacitor plate secured to a limited portion of a first surface of a relatively rigid ceramic substrate and having a diaphragm with an electrically conductive surface forming a second capacitor plate, the diaphragm

A pressure sensor comprises an improved capacitive pressure transducer having a first capacitor plate secured to a limited portion of a first surface of a relatively rigid ceramic substrate and having a diaphragm with an electrically conductive surface forming a second capacitor plate, the diaphragm being secured to the ceramic substrate at a location spaced inwardly from the periphery of that first substrate surface for disposing the second capacitor plate in spaced, overlying relation to the first capacitor plate to be movable in response to applied pressure for varying the capacitor formed by the plates. Support means bear against opposite surfaces of the ceramic substrate at the periphery of the substrate for mounting the transducer with the diaphragm thereof substantially free of mounting stresses to be exposed to a pressure force in a pressure zone to be monitored.

대표청구항 ▼

A transducer comprising a substantially flat ceramic substrate having a flat surface on one side and having an opposite side, a first electrically conductive capacitor plate mounted on a central part of the flat surface on said one side of the flat, ceramic substrate, movable means mounted on said s

A transducer comprising a substantially flat ceramic substrate having a flat surface on one side and having an opposite side, a first electrically conductive capacitor plate mounted on a central part of the flat surface on said one side of the flat, ceramic substrate, movable means mounted on said substrate surface at a location spaced to leave a peripheral portion of the flat ceramic substrate free to be engaged from each of two opposite sides of the flat ceramic substrate and having an electrically conductive surface portion of the movable means forming a second capacitor plate disposed over the first capacitor plate in selected spaced relation to the first capacitor plate to form a capacitor, and means for electrically connecting the first and second capacitor plates in an electrical circuit, the movable means being selectivly movable relative to the first capacitor plate for varying the capacitance of the capacitor in accordance with a selected change in condition being monitored while leaving the peripheral portion of said substrate accessible to be gripped at said two opposite sides of said peripheral portion of the flat ceramic substrate for mounting the transducer while leaving the movable means substantially free of stresses assciated with such mounting.