초록 ▼

A cryopump with quicker adsorption of non-condensible gases is disclosed. The second stage cryopanel of this cryopump is comprised of an array of discs spaced along an axis perpendicular to the frontal cryopanel, and in close thermal contact with the second stage heat sink. Each disc of the array is

A cryopump with quicker adsorption of non-condensible gases is disclosed. The second stage cryopanel of this cryopump is comprised of an array of discs spaced along an axis perpendicular to the frontal cryopanel, and in close thermal contact with the second stage heat sink. Each disc of the array is bent toward the frontal cryopanel at the outer edge of the disc and is flat radially inward from the bend. Each disc is coated with adsorbent material on the surface away from the frontal cryopanel radially inward from the bend in the disc.

대표청구항 ▼

A cryopump which comprises: a refrigerator having first and second stages; a second stage cryopanel in thermal contact with a heat sink on the second stage of the refrigerator to condense low temperature condensing gases; a radiation shield surrounding the second stage cryopanel and in thermal conta

A cryopump which comprises: a refrigerator having first and second stages; a second stage cryopanel in thermal contact with a heat sink on the second stage of the refrigerator to condense low temperature condensing gases; a radiation shield surrounding the second stage cryopanel and in thermal contact with a first stage heat sink, and a frontal cryopanel across an opening in the radiation shield serving as a radiation shield for the second stage cryopanel and as a cryopumping surface for higher condensing temperature gases; the second stage cryopanel comprising an array of discs spaced along an axis perpendicular to the frontal cryopanel, and in close thermal contact with the second stage heat sink, each disc of the array being bent toward the frontal cryopanel at the outer edge of the disc, being flat radially inward from the bend, and being coated with adsorbent material on the surface away from the frontal cryopanel radially inward from the bend in the disc, the outermost edge of each disc being at about the same height as the flat portion of the next disc which lies proximate to the frontal cryopanel.