[특허]Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment

Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	F16C-032/06 F16C-033/72 F16J-015/16 F16J-015/40
출원번호	US-0921435 (1986-10-22)
발명자 / 주소	Pollock John D. (Rowley MA)
출원인 / 주소	Eclipse Ion Technology, Inc. (Gloucester MA 02)
인용정보	피인용 횟수 : 42 인용 특허 : 0

초록 ▼

A high vacuum ion implantation chamber has a lower wall formed with an opening accommodating a depending sleeve through which a shaft passes supporting a substrate support platform at the top and connectable to external linear and rotary drives at the bottom. The sleeve is formed with four axially spaced annular grooves each coupled to a respective vacuum pump that maintains the annular grooves at respective pressures that progressively increase for grooves further away from the vacuum chamber bottom wall. A lowermost annular groove functions as an exhaust along with the region surrounding the shaft at the bottom of the sleeve. The sleeve also includes an air inlet. The gravity forces acting upon the shaft and platform assembly are counterbalanced by the differential pressure acting over the shaft area between the high vacuum chamber and the ambient surroundings.

대표청구항 ▼

A linear gas bearing comprising shaft means for coupling vertical linear movement from an external source to a platform located inside a high vacuum chamber having a chamber wall, sleeve means connected to said chamber wall for slidably accommodating said shaft means, said sleeve means being formed with a plurality of axially spaced grooves adjacent to said shaft means, vacuum pump means coupled to said grooves for establishing pressures in said grooves that progressively increase further from said high vacuum chamber, and means for maintaining a gas film between said shaft means and said sleeve means and interconnecting said grooves, whereby a non-contact seal is provided between said shaft means and said sleeve means, and wherein gravity forces acting on said shaft and platform are counterbalanced by the pressure difference between the high vacuum inside said high vacuum chamber and ambient pressure outside said high vacuum chamber acting on said shaft means. A linear bearing system for ion implant equipment comprising a high precision shaft of predetermined diameter extending through a wall of a high vacuum chamber, a bearing sleeve connected externally to said chamber for slidably accommodating said shaft for linear, reciprocating movement with respect thereto, said bearing sleeve defining a plurality of internal annular grooves at successively lower respective pressures between atmospheric pressure and high vacuum levels, said grooves axially spaced along and adjacent said high precision shaft, vacuum pump means for establishing and maintaining said pressures in said grooves, and means for maintaining a gas film of preselected thickness between said precision diameter shaft and said bearing sleeve and interconnecting said grooves, and wherein the one of said grooves nearest said chamber being maintained at a pressure sufficient to set a flow of gas between said shaft and said bearing sleeve and into said chamber to negligible levels, whereby a non-contact seal is provided between said high precision shaft and said bearing sleeve while permitting linear, reciprocating motion of said shaft with respect to said bearing sleeve.

이 특허를 인용한 특허 (42)

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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연합인증

Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

이 특허를 인용한 특허 (42)

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연합인증

Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

전체(0) 논문(0) 특허(0) 보고서(0)

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이 특허를 인용한 특허 (42)

관련 콘텐츠

특허 원문 보기

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