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Temperature control for device under test 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01K-017/00
출원번호 US-0728860 (1985-04-30)
발명자 / 주소
  • Eager George (Cambridge MA) Selverstone Pater (Cambridge MA)
출원인 / 주소
  • Temptronic Corporation (Newton MA 02)
인용정보 피인용 횟수 : 94  인용 특허 : 0

초록 ▼

A system for and method of precisely controlling the temperature of an electronic component through a range of temperatures by controlling the temperature of a gas forced into contact with the component is disclosed. The system comprises a dual control loop including two sensors, one for measuring t

대표청구항 ▼

In a system for precisely controlling the temperature of a substantially solid object through a range of temperatures, said system including (a) support means for supporting said object; (b) means, responsive to a control signal, for contorlling the temperature of a fluid; (c) means for directing sa

이 특허를 인용한 특허 (94)

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