이 특허를 인용한 특허 (28)

1. Leung Albert M.,CAX, Accelerometer without proof mass.

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2. Leung, Albert M., Accelerometer without proof mass.

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3. Leung, Albert M., Accelerometer without proof mass.

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4. Kirkpatrick,Peter E.; Finot,Marc, Apparatus and method for heating micro-components mounted on a substrate.

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5. Iwaki,Takao; Wado,Hiroyuki; Yamamoto,Toshimasa; Isomura,Kiyokazu; Mizutani,Tomoyuki; Teshigahara,Akihiko; Abe,Ryuuichirou, Flow sensor having thin film portion and method for manufacturing the same.

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6. Lee, Yeol Hwa; Koo, Seong Wan; Choi, Jong Hak, Heat-flux gage, manufacturing method and manufacturing device thereof.

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7. Adams John R. (Calgary CAX) Price Patrick S. (Calgary CAX) Smith Jim W. (Calgary CAX), Inertial based pipeline monitoring system.

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8. Vincze, Craig A.; Gibson, James; Parsons, James D.; Fehlman, Thomas E., Mass flow meter with chip-type sensors.

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9. Vincze,Craig A.; Gibson,James; Parsons,James D.; Fehlman,Thomas E., Mass flow meter with symmetrical sensors.

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10. McCoy,Fred Grant; Fazekas,Jonathan Mark; Borntrager,Ryan R., Method and apparatus for detecting a gas.

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11. McCoy, Fred Grant; Fazekas, Jonathan Mark; Borntrager, Ryan R., Method and apparatus for detecting leaks.

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12. McCoy, Fred Grant; Fazekas, Jonathan Mark; Borntrager, Ryan R., Method and apparatus for detecting leaks.

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13. McCoy, Fred Grant; Fazekas, Jonathan Mark; Borntrager, Ryan R., Method and apparatus for detecting leaks.

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14. McCoy,Fred Grant; Fazekas,Jonathan Mark; Borntrager,Ryan R., Method and apparatus for detecting leaks.

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15. Tuck Alan,GBX ; Brayson Gary,GBX ; Ignagni Mario B. ; Touchberry Alan B. ; Anderson Donald William,GBX ; Glen Stephen James,GBX ; Gilman James Michael Alexander,GBX, Method and apparatus for determining location of characteristics of a pipeline.

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16. Hauf Thomas (Seefeld DEX), Method for determining the size of airborne water droplets.

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17. Coppeta,Jonathan R., Method for fabricating micro optical elements using CMP.

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18. Sood,Ajay Kumar; Ghosh,Shankar, Method for measurement of gas flow velocity, method for energy conversion using gas flow over solid material, and device therefor.

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19. Bonne Ulrich ; Haji-Sheikh Michael J. ; Higashi Robert E. ; Padmanabhan Aravind, Microsensor housing.

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20. Auret, Laurent; Flourens, Frederic; Fillaudeau, Luc, Microsensor produced in microsystem technologies for the measurement and/or detection of fouling.

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21. Viard, Romain; Talbi, Abdelkrim; Pernod, Philippe Jacques; Merlen, Alain; Preobrazhensky, Vladimir, Miniaturized sensor comprising a heating element, and associated production method.

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22. Saul Cyro K.,BRX ; Zemel Jay N., Multi-purpose integrated intensive variable sensor.

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23. Azar Kaveh, Pedestal-mounted sensor.

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24. Zechnall Martin,DEX ; Treutler Christoph,DEX ; Lembke Manfred,DEX ; Hecht Hans,DEX ; Marek Jiri,DEX ; Goebel Herbert,DEX ; Willmann Martin,DEX ; Gruber Hans-Ulrich,DEX ; Lock Andreas,DEX ; Heyers Kla, Sensor having a thin film element.

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25. Becke, Craig Scott; Ricks, Lamar Floyd; Speldrich, Jamie W., Thermal anemometer flow sensor apparatus with a seal with conductive interconnect.

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26. Feder, Jan; Beyerle, Rick; Byers, Stephen; Jones, Thomas, Thermal control of a DUT using a thermal control substrate.

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27. Feder,Jan; Beyerle,Rick; Byers,Stephen; Jones,Thomas, Thermal control of a DUT using a thermal control substrate.

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28. Hamann, Hendrik F.; Klein, Levente, Three dimensional air flow sensors for data center cooling.

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