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특허 상세정보

Flow sensor on insulator

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) G01F-001/68   
미국특허분류(USC) 73/204
출원번호 US-0857986 (1986-05-01)
발명자 / 주소
인용정보 피인용 횟수 : 28  인용 특허 : 0
초록

A flow sensor on a thermally insulating substrate is provided with improved thermal conductance and ruggedness to hostile environments. The flow sensor includes a pn junction temperature sensing element on the substrate, a layer of dielectric material, which provides electric isolation and physical protection, covering the pn junction element, and a thin film heating element covering the dielectric layer and being in close thermal contact with the pn junction element.

대표
청구항

A flow sensor comprising: a thermally insulating substrate; a temperature sensing element disposed on said substrate; and a thin film heating element disposed on said temperature sensing element and being in close thermal contact with and electrically isolated from said temperature sensing element; wherein said temperature sensing element includes a pn junction having a p-doped region and a n-doped region positioned laterally on said substrate and a junction between the p-doped and the n-doped regions; and wherein said heating element is positioned over ...

이 특허를 인용한 특허 피인용횟수: 28

  1. Leung Albert M.,CAX. Accelerometer without proof mass. USP2001026182509.
  2. Leung, Albert M.. Accelerometer without proof mass. USP2003076589433.
  3. Leung, Albert M.. Accelerometer without proof mass. USP2003126666088.
  4. Kirkpatrick,Peter E.; Finot,Marc. Apparatus and method for heating micro-components mounted on a substrate. USP2006026998587.
  5. Iwaki,Takao; Wado,Hiroyuki; Yamamoto,Toshimasa; Isomura,Kiyokazu; Mizutani,Tomoyuki; Teshigahara,Akihiko; Abe,Ryuuichirou. Flow sensor having thin film portion and method for manufacturing the same. USP2006016983653.
  6. Lee, Yeol Hwa; Koo, Seong Wan; Choi, Jong Hak. Heat-flux gage, manufacturing method and manufacturing device thereof. USP2005016837614.
  7. Adams John R. (Calgary CAX) Price Patrick S. (Calgary CAX) Smith Jim W. (Calgary CAX). Inertial based pipeline monitoring system. USP1990084945775.
  8. Vincze, Craig A.; Gibson, James; Parsons, James D.; Fehlman, Thomas E.. Mass flow meter with chip-type sensors. USP2005046883370.
  9. Vincze,Craig A.; Gibson,James; Parsons,James D.; Fehlman,Thomas E.. Mass flow meter with symmetrical sensors. USP2006047021136.
  10. McCoy,Fred Grant; Fazekas,Jonathan Mark; Borntrager,Ryan R.. Method and apparatus for detecting a gas. USP2006057051578.
  11. McCoy, Fred Grant; Fazekas, Jonathan Mark; Borntrager, Ryan R.. Method and apparatus for detecting leaks. USP2005016840086.
  12. McCoy, Fred Grant; Fazekas, Jonathan Mark; Borntrager, Ryan R.. Method and apparatus for detecting leaks. USP2005036860140.
  13. McCoy, Fred Grant; Fazekas, Jonathan Mark; Borntrager, Ryan R.. Method and apparatus for detecting leaks. USP2005036860141.
  14. McCoy,Fred Grant; Fazekas,Jonathan Mark; Borntrager,Ryan R.. Method and apparatus for detecting leaks. USP2007027178385.
  15. Tuck Alan,GBX ; Brayson Gary,GBX ; Ignagni Mario B. ; Touchberry Alan B. ; Anderson Donald William,GBX ; Glen Stephen James,GBX ; Gilman James Michael Alexander,GBX. Method and apparatus for determining location of characteristics of a pipeline. USP2001066243657.
  16. Hauf Thomas (Seefeld DEX). Method for determining the size of airborne water droplets. USP1996105567865.
  17. Coppeta,Jonathan R.. Method for fabricating micro optical elements using CMP. USP2008087416674.
  18. Sood,Ajay Kumar; Ghosh,Shankar. Method for measurement of gas flow velocity, method for energy conversion using gas flow over solid material, and device therefor. USP2007127302845.
  19. Bonne Ulrich ; Haji-Sheikh Michael J. ; Higashi Robert E. ; Padmanabhan Aravind. Microsensor housing. USP2001116322247.
  20. Auret, Laurent; Flourens, Frederic; Fillaudeau, Luc. Microsensor produced in microsystem technologies for the measurement and/or detection of fouling. USP2014068746968.
  21. Viard, Romain; Talbi, Abdelkrim; Pernod, Philippe Jacques; Merlen, Alain; Preobrazhensky, Vladimir. Miniaturized sensor comprising a heating element, and associated production method. USP2016109476746.
  22. Saul Cyro K.,BRX ; Zemel Jay N.. Multi-purpose integrated intensive variable sensor. USP2001096290388.
  23. Azar Kaveh. Pedestal-mounted sensor. USP2001056240371.
  24. Zechnall Martin,DEX ; Treutler Christoph,DEX ; Lembke Manfred,DEX ; Hecht Hans,DEX ; Marek Jiri,DEX ; Goebel Herbert,DEX ; Willmann Martin,DEX ; Gruber Hans-Ulrich,DEX ; Lock Andreas,DEX ; Heyers Kla. Sensor having a thin film element. USP2000086101872.
  25. Becke, Craig Scott; Ricks, Lamar Floyd; Speldrich, Jamie W.. Thermal anemometer flow sensor apparatus with a seal with conductive interconnect. USP2011027891238.
  26. Feder, Jan; Beyerle, Rick; Byers, Stephen; Jones, Thomas. Thermal control of a DUT using a thermal control substrate. USP2004116825681.
  27. Feder,Jan; Beyerle,Rick; Byers,Stephen; Jones,Thomas. Thermal control of a DUT using a thermal control substrate. USP2006016985000.
  28. Hamann, Hendrik F.; Klein, Levente. Three dimensional air flow sensors for data center cooling. USP2013088521449.