이 특허를 인용한 특허 (41)

1. Sawada,Kiyoshi; Ebihara,Kenzo, Aerostatic bearing.

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2. Schubert, Gerhard; Jackel, Christian; Kirschstein, Ulf-Carsten; Boehm, Michael; Bauer, René; Harnisch, Gerd; Peschel, Thomas; Risse, Stefan; Schenk, Christoph, Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application.

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3. Devitt, Andrew, Air bearing for use as a seal.

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4. Devitt, Andrew, Air bearing for use as seal.

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5. Douglas C. Watson ; W. Thomas Novak, Air bearing linear guide for use in a vacuum.

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6. Sogard Michael R. ; Spicer Denis F.,GBX, Air bearing operable in a vacuum region.

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7. Kawai,Tomohiko; Ebihara,Kenzo, Air bearing structure and linear driving device using said air bearing structure.

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8. Porper Joseph, Engraving machine.

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9. Fujikawa, Yoshio; Itoh, Takayuki, Externally pressurized gas bearing spindle assembly.

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10. Sogard Michael R., Fluid bearing operable in a vacuum region.

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11. Oen Richard J. (Wapakoneta OH) Daniel Edward A. (Fort Loramie OH), Fluid control system for rotating shaft or flywheel.

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12. Yuasa, Satoru; Tamura, Yoshio; Nakaya, Makoto; Matsuno, Tomoyasu; Nagai, Nobuo, Holder driving unit.

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13. Lyon Gregory S., Hydrostatic bearing and fluid collection system.

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14. Wasson,Kevin Lee; Sheehan,Terrence; Soroka,Daniel, Hydrostatic bearing for linear motion guidance.

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15. Wasson,Kevin Lee; Sheehan,Terrence; Soroka,Daniel, Hydrostatic bearing for linear motion guidance.

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16. Shinohara,Shinji; Tsuda,Takuma; Hayashida,Takeshi, Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device.

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17. Shinohara,Shinji; Tsuda,Takuma; Hayashida,Takeshi, Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device.

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18. Katsuhito Nishikawa ; Thomas F. Carlos, Linear robot.

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19. Devitt, Andrew J., Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped groves and sealing lands in a non-contact manner.

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20. Devitt, Andrew J., Method and apparatus for in-line processing and immediately sequential or simultaneous processing of flat and flexible substrates through viscous shear in thin cross section gaps for the manufacture of micro-electronic circuits or displays.

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21. Keller, Karl, Mounting piece for admitting a roll pin.

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22. Devitt,Andrew J., Moving vacuum chamber stage with air bearing and differentially pumped grooves.

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23. Okamiya,Akio; Ito,Takahiko, Oil repelling agent.

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24. Mauney C. Richard (Mooresville NC), Oil scavenge check valve apparatus.

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25. Kapadia Neville D. (Bombay NC INX) Vincent Thomas E. (Charlotte NC) Taylor Larry K. (Mooresville NC), Oil scavenger system for a seal for a rotary shaft.

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26. Katsuhito Nishikawa ; Thomas F. Carlos, Particulate free air bearing and seal.

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27. Devitt, Andrew J., Porous media ventless seal.

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28. Kiikka, Dale E., Porous restrictor for gas bearing.

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29. Matsushita Koichi (Chiba JPX) Suzuki Hiroyuki (Ushiku JPX), Rotary motion driving apparatus.

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30. Shinozaki, Hiroyuki, Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber.

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31. Shinozaki,Hiroyuki, Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber.

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32. Hashimoto Akio,JPX, Sealing mechanism for sealing a vacuum chamber.

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33. Hashimoto, Akio, Sealing mechanism for sealing a vacuum chamber.

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34. Hashimoto,Akio, Sealing mechanism for sealing a vacuum chamber.

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35. Hashimoto,Akio, Sealing mechanism for sealing a vacuum chamber.

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36. Parmeter, Larry J.; Craig, Chad A., Self leveling dynamically stable radial bearing.

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37. Sincarsin, Wayne G., Single axis rotational gas bearing with feed-through.

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38. Sai,Choshoku; Akutsu,Kotaro, Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method.

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39. Devitt, Andrew J., Thrust bearing as a seal.

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40. Prieto, Carlos A, Tuned bearing.

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41. Ryding, Geoffrey; Smick, Theodore H.; Farley, Marvin; Sakase, Takao, Vacuum bearing structure and a method of supporting a movable member.

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