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Chemical vapor deposition of zinc oxide films and products 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B32B-009/00
  • B32B-019/00
  • C23C-016/40
출원번호 US-0024871 (1987-03-12)
발명자 / 주소
  • Vijayakumar Pantham S. (Granada Hills CA) Blaker Kimberly A. (Granada Hills CA) Wieting Robert D. (Simi Valley CA) Wong Boon (Reseda CA) Halani Arvind T. (Canoga Park CA)
출원인 / 주소
  • Atlantic Richfield Company (Los Angeles CA 02)
인용정보 피인용 횟수 : 90  인용 특허 : 0

초록

Zinc oxide is applied to a substrate at a low temperature by using a mixture of an organozinc compound and water carried in an inert gas. The resulting zinc oxide film has a relatively low resistivity which can be varied by addition of a group III element.

대표청구항 ▼

A zinc oxide film having a resistivity of less than 2.5×10-3 ohm-centimeter and a thickness of up to 2 microns, and which is characterized by having been deposited on a substrate by the introduction of: (a) an organozinc compound vapor selected from the group consisting of dimethylzinc and diethylzi

이 특허를 인용한 특허 (90)

  1. Farris, III, Chester A., Affixing method and solar decal device using a thin film photovoltaic.
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  2. Alexander, Paul; Aragon, Steven, Apparatus and method utilizing forced convection for uniform thermal treatment of thin film devices.
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  3. Doering, Kenneth B.; Wieting, Robert D., Apparatus for manufacturing thin film photovoltaic devices.
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  4. Farris, III, Chester A.; Brown, Albert S., Application specific solar cell and method for manufacture using thin film photovoltaic materials.
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  5. Alexander, Paul, Bell jar extraction tool method and apparatus for thin film photovoltaic materials.
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  6. Lee, Howard W. H., Bulk chloride species treatment of thin film photovoltaic cell and manufacturing method.
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  7. Lee, Howard W. H., Bulk metal species treatment of thin film photovoltaic cell and manufacturing method.
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  8. Lee, Howard W. H., Bulk sodium species treatment of thin film photovoltaic cell and manufacturing method.
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  9. Lee, Howard W. H., Bulk sulfide species treatment of thin film photovoltaic cell and manufacturing method.
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  10. Ramanathan Kannan V. ; Contreras Miguel A. ; Bhattacharya Raghu N. ; Keane James ; Noufi Rommel, Cadmium-free junction fabrication process for CuInSe.sub.2 thin film solar cells.
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  11. Gordon Roy G. ; Kramer Keith ; Liang Haifan, Chemical vapor deposition of fluorine-doped zinc oxide.
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  12. Bluhm, Martin E.; Silverman, Gary S.; Korotkov, Roman Y., Chemical vapor deposition using N,O polydentate ligand complexes of metals.
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  13. Lee, Howard W. H., Chloride species surface treatment of thin film photovoltaic cell and manufacturing method.
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  14. Hurst, Simon James; Ammerlaan, Johannes Andreas Maria; McCurdy, Richard Joseph, Coatings on substrates.
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  15. Buquing, Miljon T., Consumable adhesive layer for thin film photovoltaic material.
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  16. Lee, Howard W. H., Copper species surface treatment of thin film photovoltaic cell and manufacturing method.
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  17. Koukitu, Akinori; Kumagai, Yoshinao; Fujii, Tetsuo; Yoshii, Naoki, Epitaxial growth method of a zinc oxide based semiconductor layer, epitaxial crystal structure, epitaxial crystal growth apparatus, and semiconductor device.
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  18. Yasui, Kanji; Nishiyama, Hiroshi; Tsukichi, Masatoshi; Inoue, Yasunobu; Takata, Masasuke, Fabrication method and fabrication apparatus for fabricating metal oxide thin film.
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  19. Koch, Michael Herman; Lamb, Robert Norman; Mar, Gock Leong; Timbrell, Peter Yorke, Fabrication of Zinc Oxide films on non-planar substrates and the use thereof.
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  20. Narasimhan, Mukundan; Johnson, Todd; Basol, Bulent M., Finger pattern formation for thin film solar cells.
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  21. Varanasi, Srikanth; Strickler, David A., Glass article having a zinc oxide coating and method for making same.
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  22. Lee, Howard W. H., High efficiency photovoltaic cell and manufacturing method free of metal disulfide barrier material.
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  23. Wieting, Robert D., Humidity control and method for thin film photovoltaic materials.
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  24. Wieting, Robert D., In chamber sodium doping process and system for large scale cigs based thin film photovoltaic materials.
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  25. Wieting, Robert D., Large scale chemical bath system and method for cadmium sulfide processing of thin film photovoltaic materials.
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  26. Dowben Peter A. (Dewitt NY) Onellion Marshall (Stoughton WI), Laser CVD and plasma CVD of CrO2 films and cobalt doped CrO2films using organometallic precu.
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  27. Farris, III, Chester A., Laser separation method for manufacture of unit cells for thin film photovoltaic materials.
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  28. Abrams, Michael B.; Korotkov, Roman Y.; Silverman, Gary S.; Smith, Ryan C.; Stricker, Jeffery L., Low temperature method of making a zinc oxide coated article and the coated article made thereby.
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  29. Wieting, Robert D., Manufacturing method for patterning CIGS/CIS solar cells.
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  30. Lee, Howard W. H., Metal species surface treatment of thin film photovoltaic cell and manufacturing method.
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  31. Ramanathan, Kannan; Wieting, Robert D., Method and device for cadmium-free solar cells.
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  32. Wieting, Robert D.; Jackson, Jason Todd, Method and device for cadmium-free solar cells.
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  33. Lee, Howard W. H.; Mikulec, Frederic Victor; Gao, Bing Shen; Huang, Jinman, Method and material for processing iron disilicide for photovoltaic application.
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  34. Mikulec, Frederic Victor; Gao, Bing Shen; Lee, Howard W. H., Method and material for purifying iron disilicide for photovoltaic application.
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  35. Farris, III, Chester A., Method and structure for forming module using a powder coating and thermal treatment process.
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  36. Tandon, Ashish; Wieting, Robert D.; Schmizberger, Jurg; Alexander, Paul, Method and structure for processing thin film PV cells with improved temperature uniformity.
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  37. Lee, Howard W. H., Method and structure for thin film photovoltaic cell using similar material junction.
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  38. Lee, Howard W. H., Method and structure for thin film photovoltaic materials using bulk semiconductor materials.
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  39. Lee, Howard W. H., Method and structure for thin film photovoltaic materials using bulk semiconductor materials.
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  40. Lee, Howard W. H., Method and structure for thin film photovoltaic materials using semiconductor materials.
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  41. Wieting, Robert D., Method and structure for tiling industrial thin-film solar devices.
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  42. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
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  43. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
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  44. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
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  45. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
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  46. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using single-chamber configuration.
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  47. Farris, III, Chester A., Method and system for laser separation for exclusion region of multi-junction photovoltaic materials.
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  48. Weiting, Robert D., Method and system for recycling processing gas for selenization of thin film photovoltaic materials.
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  49. McCurdy Richard J., Method for depositing titanium oxide coatings on flat glass.
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  50. Garg, Diwakar; Henderson, Philip Bruce; Tempel, Daniel Joseph; Jackson, Thomas N.; Sun, Jie, Method for depositing zinc oxide at low temperatures and products formed thereby.
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  51. Strickler, David A.; Hamilton, Mark M.; Remington, Jr., Michael P., Method for depositing zinc oxide coatings on flat glass.
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  52. Patterson, Frank, Method for improved patterning accuracy for thin film photovoltaic panels.
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  53. Lee, Howard W. H.; Farris, III, Chester A., Method for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
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  54. Huang, Jinman; Lee, Howard W. H., Method for manufacture of semiconductor bearing thin film material.
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  55. Kroll,Ulrich; Meier,Johannes, Method of depositing an oxide layer on a substrate and a photovoltaic cell using said substrate.
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  56. Stricker, Jeffery L.; Abrams, Michael B.; Korotkov, Roman Y.; Silverman, Gary S.; Smith, Ryan C., Method of forming a zinc oxide coated article.
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  57. Smith, Ryan C.; Abrams, Michael B.; Korotkov, Roman Y.; Silverman, Gary S.; Stricker, Jeffery L.; Sanderson, Kevin David; Ye, Liang; Gutiérrez, Guillermo Benito, Method of making a low-resistivity, doped zinc oxide coated glass article and the coated glass article made thereby.
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  58. Stricker, Jeffery L.; Smith, Ryan C.; Abrams, Michael B.; Korotkov, Roman Y.; Silverman, Gary S.; Sanderson, Kevin David; Ye, Liang; Gutiérrez, Guillermo Benito, Method of making low resisitivity doped zinc oxide coatings and the articles formed thereby.
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  59. Wieting, Robert D., Method of manufacture of sodium doped CIGS/CIGSS absorber layers for high efficiency photovoltaic devices.
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  60. Lee, Howard W. H., Methods for infusing one or more materials into nano-voids of nanoporous or nanostructured materials.
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  61. Wieting, Robert D., Patterned thin film photovoltaic module.
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  62. Wieting, Robert D., Patterning electrode materials free from berm structures for thin film photovoltaic cells.
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  63. Charles B. Greenberg ; Caroline S. Harris ; Vincent Korthuis ; Luke A. Kutilek ; David E. Singleton ; Janos Szanyi ; James P. Thiel, Photocatalytically-activated self-cleaning article and method of making same.
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  64. Greenberg,Charles B.; Harris,Caroline S.; Korthuis,Vincent; Kutilek,Luke A.; Singleton,David E.; Szanyi,Janos; Thiel,James P., Photocatalytically-activated self-cleaning article and method of making same.
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  65. Yang, Frank; Wieting, Robert, Pin striped thin film solar module for cluster lamp.
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  66. Yang, Frank; Wieting, Robert, Pin striped thin film solar module for cooler.
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  67. Yang, Frank; Wieting, Robert, Pin striped thin film solar module for garden lamp.
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  68. Yang, Frank; Wieting, Robert, Pin striped thin film solar module for laptop personal computer.
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  69. Yang, Frank; Wieting, Robert, Pin striped thin film solar module for recreational vehicle.
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  70. Yang, Frank; Wieting, Robert, Pin striped thin film solar module for street lamp.
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  71. Lee, Howard W. H., Processing method for cleaning sulfur entities of contact regions.
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  72. Alexander, Paul; Schmitzberger, Jurg; Tandon, Ashish; Wieting, Robert D., Quartz boat method and apparatus for thin film thermal treatment.
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  73. Sugihara, Toshinori; Ohno, Hideo; Kawasaki, Masashi, Semiconductor device with an active layer containing zinc oxide, manufacturing method, and electronic device.
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  74. Lee, Howard W. H., Sodium species surface treatment of thin film photovoltaic cell and manufacturing method.
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  75. Lee, Howard W. H., Sulfide species treatment of thin film photovoltaic cell and manufacturing method.
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  76. Wieting, Robert D., System and method for transferring substrates in large scale processing of CIGS and/or CIS devices.
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  77. Wieting, Robert D., Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates.
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  78. Wieting, Robert D., Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates.
    상세보기
  79. Wieting, Robert D., Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates.
    상세보기
  80. Wieting, Robert D., Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates.
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  81. Wieting, Robert D., Thermal pre-treatment process for soda lime glass substrate for thin film photovoltaic materials.
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  82. Lee, Howard W. H., Thin film metal oxide bearing semiconductor material for single junction solar cell devices.
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  83. Greenberg, Charles B.; Szanyi, Janos, Visible-light-responsive photoactive coating, coated article, and method of making same.
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  84. Dean M. Giolando, Volatile organometallic complexes of lowered reactivity suitable for use in chemical vapor deposition of metal oxide films.
    상세보기
  85. Giolando, Dean M., Volatile organometallic complexes suitable for use in chemical vapor depositions on metal oxide films.
    상세보기
  86. Wieting, Robert D., Zinc oxide film method and structure for CIGS cell.
    상세보기
  87. Wieting, Robert D., Zinc oxide film method and structure for cigs cell.
    상세보기
  88. Park, SooHo; Park, JongSe; Yoo, Young Zo; Lee, Joo Young; Kim, Seo Hyun; Yoon, Gun Sang; Kim, Myong Woon; Shin, Hyung Soo; Yoo, Seung Ho; Lee, Sang Do; Lee, Sang Ick; Yim, Sang Jun, Zinc oxide precursor and method of depositing zinc oxide-based thin film using the same.
    상세보기
  89. Gordon Roy G. (Cambridge MA), Zinc oxyfluoride transparent conductor.
    상세보기
  90. Ramanathan,Kannan; Hasoon,Falah S.; Asher,Sarah E.; Dolan,James; Keane,James C., ZnO/Cu(InGa)Sesolar cells prepared by vapor phase Zn doping.
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