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Silicon valve 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-007/14
  • F16K-031/02
  • B05B-001/02
출원번호 US-0930462 (1986-11-13)
발명자 / 주소
  • Giachino Joseph M. (Farmington Hills MI) Kress James W. (Dearborn MI)
출원인 / 주소
  • Ford Motor Company (Dearborn MI 02)
인용정보 피인용 횟수 : 69  인용 특허 : 0

초록

A silicon valve for controlling the flow of a fluid includes two generally planar silicon members. One has an orifice for passing the fluid and the other has a relatively moveable surface to selectively open and close the orifice thereby controlling the flow of fluid through the orifice.

대표청구항

A silicon valve for controlling the flow of a fluid including: a first generally planar silicon member having an orifice for passign the fluid; and a second silicon member, separate from said first silicon member, having a planar silicon surface aligned with and relative moveable to said orfice for

이 특허를 인용한 특허 (69)

  1. Cabuz, Cleopatra, 3D array integrated cells for the sampling and detection of air bound chemical and biological species.
  2. Cabuz, Cleopatra, 3D array of integrated cells for the sampling and detection of air bound chemical and biological species.
  3. Cabuz, Cleopatra, 3D array of integrated cells for the sampling and detection of air bound chemical and biological species.
  4. Cabuz, Eugen I.; Wang, Tzu Yu, Asymmetric dual diaphragm pump.
  5. Jerman John H. (Palo Alto CA), Bimetallic diaphragm with split hinge for microactuator.
  6. Cabuz Cleopatra ; Ohnstein Thomas R. ; Herb William R., Buckled actuator with enhanced restoring force.
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  8. Young, Gregory; Kucera, David; Kasprzyk, Donald J.; Super, Willem; Praat, Jos; Thiewes, Roelof; van der Mei, Hans; Zabel, Brian; Mitchell, John D., Burner control system.
  9. Kolb, Tobias; Roeder, Sascha, Controllable valve and inhalation device.
  10. Saaski Elric W., Disposable fluidic circuit cards.
  11. Bonne,Ulrich; Cabuz,Cleopatra; Cabuz,Eugen I.; Kemp,Stephen J.; Adams,John T.; Wang,Tzu Yu; Munsterhuis,Sybrandus B. V.; Baarda,Gerrit J., Electrostatically actuated gas valve.
  12. Cabuz, Eugen I.; Cabuz, Cleopatra, Electrostatically actuated pump with elastic restoring forces.
  13. Cabuz, Cleopatra; Cabuz, Eugen I., Electrostatically actuated valve.
  14. Cabuz, Cleopatra; Cabuz, Eugen I., Electrostatically actuated valve.
  15. Houk, Galen D.; Schones, Thomas A.; Peterson, Tony S., Enhancements for adhesive attachment of piezoelectric motor elements to a disk drive suspension.
  16. Houk,Galen D., Enhancements for adhesive attachment of piezoelectric motor elements to a disk drive suspension.
  17. Cabuz,Cleopatra; Cabuz,Eugen, Flow control system of a cartridge.
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  19. Ogihara Yoshimi,JPX ; Tani Yasuhide,JPX, Fluid injection nozzle.
  20. Sayar,Hamid, Fluidic flow controller orifice disc for fuel injector.
  21. Gardner Robert C. (Taylor MI) Giachino Joseph M. (Farmington Hills MI) Horn William F. (Plymouth MI) Rhoades Mark K. (Ferndale MI) Wells Marvin D. (Redford MI) Yockey Steve J. (Farmington Hills MI), Fuel injector with silicon nozzle.
  22. Kucera, David; Young, Gregory; McCarthy, Tim; Yuen, Patrick, Gas valve with communication link.
  23. Young, Gregory; Kucera, David; Kasprzyk, Donald J., Gas valve with electronic cycle counter.
  24. Kucera, David; McCarthy, Timothy; Young, Gregory; Kasprzyk, Donald J.; Praat, Jos; Manoogian, Carl; Yuen, Patrick, Gas valve with electronic health monitoring.
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  26. Young, Gregory; Kasprzyk, Donald J., Gas valve with electronic proof of closure system.
  27. Kucera, David; Kasprzyk, Donald J.; Young, Gregory; Praat, Jos; Kejik, Pavel, Gas valve with electronic valve proving system.
  28. Young, Gregory; Kasprzyk, Donald J.; Kucera, David; Praat, Jos, Gas valve with electronic valve proving system.
  29. Young, Gregory; Kasprzyk, Donald J.; Kucera, David; Filkovski, Gregory Todd; Yuen, Patrick; McCarthy, Tim; Welker, Patrick; Zabel, Brian, Gas valve with fuel rate monitor.
  30. Young, Gregory; Kasprzyk, Donald J.; Kucera, David, Gas valve with high/low gas pressure detection.
  31. Kucera, David; Young, Gregory; Kasprzyk, Donald J.; Filkovski, Gregory Todd, Gas valve with overpressure diagnostics.
  32. Benda, Jiri; Konecny, Pavel, Gas valve with overtravel.
  33. Benda, Jiri; Konecny, Pavel, Gas valve with resilient seat.
  34. Kucera, David; Young, Gregory; Kasprzyk, Donald J.; Filkovski, Gregory Todd, Gas valve with valve leakage test.
  35. Slocum,Alexander H.; White,James R., Gating apparatus and method of manufacture.
  36. Smith, Timothy J.; Wang, Tzu-Yu; Eskridge, Adam Z., Insert molded actuator components.
  37. Buelow, Philip E. O.; Siders, Randall Duane; Bretz, David H.; Thomson, Neal A., Liquid swirler flow control.
  38. Cabuz,Eugen I.; Cabuz,Cleopatra; Banu,Virgil Claudiu, Mesovalve modulator.
  39. Scheuch, Gerhard; Sommerer, Knut; Mullinger, Bernhard; Haas, Friedel; Roeder, Sascha, Method and an apparatus for providing a constant medicine dose for an inhalic application at low inhalic flow.
  40. Schwichtenberg,Jay; Padmanabhan,Aravind; Demers,Robert, Method and apparatus for receiving a removable media member.
  41. Saaski Elric W. (Bothell WA) Lawrence Dale M. (Lynnwood WA), Method for manufacturing a fluid flow regulator.
  42. Saaski Elric W. (Bothell WA) Lawrence Dale M. (Lynnwood WA), Methods for forming a contoured regulator seat.
  43. Saaski Elric W. (Bothell WA) Lawrence Dale M. (Lynnwood WA), Methods for manufacturing a filter.
  44. Saaski Elric W. (Bothell WA) Lawrence Dale M. (Lynnwood WA), Methods for manufacturing a flow switch.
  45. Cabuz, Eugen I.; Cabuz, Cleopatra, Methods of operating an electrostatically actuated pump.
  46. Bensaoula Abdelhak ; Hollingshead John Gregory ; Latham ; Jr. Lawrence Frank, Microelectromechanical machined array valve.
  47. Wang,Tzu Yu; Cabuz,Eugen, Microfluidic modulating valve.
  48. Wang,Tzu Yu; Cabuz,Eugen, Microfluidic modulating valve.
  49. Ari Glezer ; Mark G. Allen, Micromachined synthetic jet actuators and applications thereof.
  50. Sittler Fred C. (Victoria MN) Nelson Cynthia R. (Anoka MN), Micromachined valve with polyimide film diaphragm.
  51. Johnson Paul H. ; Slater Timothy, Microminiature valve having silicon diaphragm.
  52. Stoll, Kurt; Post, Peter; Weinmann, Michael; Vollmer, Herbert; Muth, Andreas, Microvalve.
  53. Reinicke Robert H., Microvalve and microthruster for satellites and methods of making and using the same.
  54. Teach,William O.; Laski,James C.; Gibson,Paul W.; Harris,Donald C.; Douglas,Kevin R., Microvalve assemblies and related structures and related methods.
  55. Cabuz,Eugen I.; Schwichtenberg,Jay G., Microvalve package assembly.
  56. Buezis, James; Bergum, Glenn; Eskridge, Adam Z.; Kasprzyk, Don; Munsterhuis, Sybrandus B. V., Modulating gas valves and systems.
  57. Super, Willem, Regulating device.
  58. Super, Willem, Regulating device.
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  60. Thomson, Neal A., Systems and method for cooling a staged airblast fuel injector.
  61. Winchell David A. (Spring Grove IL) Mitchell Richard J. (Lindenhurst IL), Systems having fixed and variable flow rate control mechanisms.
  62. Winchell David A. (Spring Grove IL) Mitchell Richard J. (Lindenhurst IL), Systems having fixed and variable flow rate control mechanisms.
  63. Albarda Scato (Gross Schenkenberg DEX) Thoren Werner (Lubeck DEX) Kahning Stefan (Steinburg DEX) Vehrens Peter (Sulfeld DEX), Valve arrangement of microstructured components.
  64. Douglas, Kevin R.; Teach, William O.; Gibson, Paul W.; Harris, Donald C.; Goodwin, Scott H.; Dausch, David E.; Dettloff, Wayne D., Valve assemblies including at least three chambers and related methods.
  65. Hiddessen Ralf,DEX ; Ossenbrugge Jan-Peter,DEX ; Grove Horst,DEX ; Rieck Frank,DEX, Valve construction.
  66. Endel, Petr; Kasprzyk, Donald; Kucera, David; Young, Gregory, Valve controller configured to estimate fuel comsumption.
  67. Van Den Bijgaart, Adrianus Wilhelmus Dionisius Maria; De Gier, Ronald Cornelis, Valve device.
  68. Young, Gregory; Kasprzyk, Donald J., Valve over-travel mechanism.
  69. Kucera, David, Valve with actuator diagnostics.
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