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Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impur 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01J-020/04
  • B01J-020/16
  • B01J-020/22
출원번호 US-0029632 (1987-03-24)
발명자 / 주소
  • Tom Glenn M. (New Milford CT) Brown Duncan W. (Wilton CT)
출원인 / 주소
  • Advanced Technology Materials, Inc. (New Milford CT 02)
인용정보 피인용 횟수 : 32  인용 특허 : 0

초록

A process for purifying a gaseous mixture comprising arsine, phosphine, ammonia, and/or inert gases, to remove Lewis acid and/or oxidant impurities therefrom, comprising contacting the mixture with a scavenger including a support having associated therewith an anion which is effective to remove such

대표청구항

A scavenger, having utility for purifying a gaseous mixture comprising (i) a primary component selected from one or more members of the group consisting of arsine, phosphine, ammonia, and inert gases, and (ii) impurities selected from one or more members of the group consisting of Lewis acids and ox

이 특허를 인용한 특허 (32)

  1. Dong,Chun Christine; Rao,Madhukar Bhaskara; Wu,Dingjun, Adsorbent for water removal from ammonia.
  2. Banucci Eugene G. ; Hultquist Steven J., Adsorbent-based storage and dispensing system.
  3. Tom Glenn M. ; Kirlin Peter S. ; McManus James V., Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery.
  4. Funke, Hans H.; Torres, Jr., Robert; Wyse, Carrie L., Composition for removing trace impurities from inert, non-reactive and reactive liquids.
  5. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT) Luxon Bruce A. (Stamford CT), Composition, apparatus, and process, for sorption of gaseous compounds of group II-VII elements.
  6. Tom Glenn M. ; Brown Duncan W., Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium.
  7. Funke, Hans H.; Fraenkel, Dan; Houlding, Virginia H., Gas purifier system containing an ultra-low emission carbon material.
  8. Funke, Hans H.; Fraenkel, Dan; Houlding, Virginia H., Gas purifier system for removing trace impurities from a reactive fluid.
  9. Tom Glenn M., High capacity gas storage and dispensing system.
  10. Brandes George R. ; Tom Glenn M. ; McManus James V., Laser system utilizing sorbent-based gas storage and delivery system.
  11. Olander W. Karl, Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means.
  12. Doyle Michael J. ; Urdaneta Nelson ; Vu Kim N., Mass flow controller with vertical purifier.
  13. Funke, Hans H.; Fraenkel, Dan; Houlding, Virginia H., Method and materials for purifying reactive gases using preconditioned ultra-low emission carbon material.
  14. Kapp Wolfgang (Laudenbach DEX) Moog Alfons (Laudenbach DEX), Method and means for preventing or delaying undesired phosphine levels.
  15. Funke, Hans H.; Fraenkel, Dan; Houlding, Virginia H., Method for producing a preconditioned ultra-low emission carbon material.
  16. Funke, Hans H.; Fraenkel, Dan; Houlding, Virginia H., Method for producing an ultra-low emission carbon material.
  17. Funke, Hans H.; Fraenkel, Dan; Houlding, Virginia H., Method for reducing trace impurities from a reactive fluid using preconditioned ultra-low emission carbon material.
  18. Funke, Hans H.; Fraenkel, Dan; Houlding, Virginia H., Method for removing impurities from process gas stream.
  19. Torres, Jr., Robert; Watanabe, Tadaharu; Vininski, Joseph V., Methods and materials for the reduction and control of moisture and oxygen in OLED devices.
  20. Wilson, Shaun M.; Sturm, Edward A., PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same.
  21. Wang Luping ; McManus James V., Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment.
  22. Chiang, Robert Ling; Whitley, Roger Dean; Wu, Dingiun; Dong, Chun Christine; Rao, Madhukar Bhaskara, Process for removing water from ammonia.
  23. Hardwick, Steven; McManus, James V., Process for sorption of hazardous waste products from exhaust gas streams.
  24. Tom Glenn M. (New Milford CT) Brown Duncan W. (Wilton CT), Process, composition, and apparatus for purifying inert gases to remove Lewis acid and oxidant impurities therefrom.
  25. Tom Glenn M. (New Milford CT) Brown Duncan W. (Wilton CT), Process, composition, and apparatus for purifying inert gases to remove lewis acid and oxidant impurities therefrom.
  26. Wu,Dingjun; Golden,Timothy Christopher; Dong,Chun Christine; Battavio,Paula Jean, Purification of hydride gases.
  27. Brown,Kurt E.; Murphy,William L., Reactive media, methods of use and assemblies for purifying.
  28. Tom Glenn M. ; McManus James V., Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium.
  29. Tischler Michael A. ; Kirlin Peter S., Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members.
  30. Hultquist Steven J. ; Tom Glenn M. ; Kirlin Peter S. ; McManus James V., Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same.
  31. Tom Glenn M. ; McManus James V., Storage and delivery system for gaseous compounds.
  32. Dietz James ; McManus James V., Throughflow gas storage and dispensing system.
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