초록 ▼

An apparatus for quantitative secondary ion mass spectrometry comprising a sealed chamber for storing a sample containing a light impurity element which is to be analyzed, secondary ion generating means for bombarding a primary ion beam onto the sample so as to allow the sample to emit a secondary i

An apparatus for quantitative secondary ion mass spectrometry comprising a sealed chamber for storing a sample containing a light impurity element which is to be analyzed, secondary ion generating means for bombarding a primary ion beam onto the sample so as to allow the sample to emit a secondary ion of the light element, and quantitative analyzing means for detecting the secondary ion so as to quantitatively analyze the light element contained in the sample. First evacuating means evacuates said sealed chamber to an ultrahigh vacuum during quantitative analysis. First cryopanel means is arranged to surround the sample, and first cooling means keeps said first cryopanel means at a cryogenic temperature during quantitative analysis so that said first cryopanel means adsorbs a gas present in said sealed chamber.

대표청구항 ▼

An apparatus for quantitative secondary ion mass spectrometry comprising: a sealed chamber for storing a sample containing a light impurity element which is to be analyzed; secondary ion generating means for bombarding a emit a secondary ion of the light element; quantitative analyzing means for det

An apparatus for quantitative secondary ion mass spectrometry comprising: a sealed chamber for storing a sample containing a light impurity element which is to be analyzed; secondary ion generating means for bombarding a emit a secondary ion of the light element; quantitative analyzing means for detecting the secondary ion so as to quantitatively analyze the light element contained in the sample; and means for producing an ultrahigh vacuum of at least 10-10 Torr during quantitative analysis including first evacutating means for evacuating said sealed chamber having first and second vacuum pumps respectively connected to said sealed chamber and opposed relative to each other, said first vacuum pump comprising a first cryopanel means arranged to surround the sample in spaced relationship therefrom and including a first cylinder with a bottom and an opposed opening, a second cryopanel means arranged to surround the first cryopanel means and including a second cylinder with a bottom and an opposed opening, the openings of said first and second cylinders arranged to oppose said second pump, and first cooling means for keeping said first and second cryopanel means at a cryogenic temperature during quantitative analysis so that said first and second cryopanel means adsorb a gas present in said sealed chamber.