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Method and apparatus for transferring wafers between cassettes and a boat 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B23K-009/00
  • C23C-015/00
출원번호 US-0864077 (1986-05-16)
발명자 / 주소
  • Hugues Jean B. (Tempe AZ) Weber Lynn (Saratoga CA) Herlinger James E. (Palo Alto CA) Nishikawa Katsuhito (San Jose CA) Schuman Donald L. (Saratoga CA) Yee Gary W. (Santa Clara CA)
출원인 / 주소
  • Silicon Valley Group, Inc. (San Jose CA 02)
인용정보 피인용 횟수 : 156  인용 특허 : 0

초록 ▼

A wafer transfer mechanism used for transferring wafers between cassettes and a boat uses sensors to detect and to measure any offset of the actual center of each wafer being transferred with respect to the expected or precalibrated center of that wafer. An appropriate adjustment is made to effectiv

대표청구항 ▼

A wafer transfer mechanism for transferring a wafer from a source to a destination while compensating for any lateral offset of the actual location of the wafer center from the expected location of the wafer center in the source so that the wafer can be placed in the destination with the actual loca

이 특허를 인용한 특허 (156)

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