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Apparatus and method for loading and unloading wafers

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B65G-001/00   
미국특허분류(USC) 414/416 ; 414/786 ; 414/752 ; 414/754
출원번호 US-0936825 (1986-12-02)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 128  인용 특허 : 4
초록
▼

Apparatus for loading and unloading wafers including a support structure having associated with it a predetermined wafer engagement position at which wafers can be engaged by the processing machine, a temporary storage device mounted on the support structure for storing a wafer in position for pick up, the flat surfaces of the wafer being parallel to an X-axis and perpendicular to a Z-axis, a first wafer engagement member for carrying the wafer on the first engagement member between the temporary storage device and the engagement position, a first X-dire...

대표
청구항
▼

Apparatus for transporting wafers between a temporary storage device and a processing machine comprising a support structure having associated with it a predetermined wafer engagement position at which wafers having flat surfaces can be engaged by said processing machine, a temporary storage device mounted on said support structure for temporarily storing a wafer in a known position for pick up, said flat surfaces of said wafer being parallel to an X-axis and perpendicular to a Z-axis, a first wafer engagement member for gripping, lifting and carrying a ...

이 특허에 인용된 특허 (4)

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